Patents by Inventor Kurt Hingerl

Kurt Hingerl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11862466
    Abstract: A method for bonding a first substrate with a second substrate, with the following sequence: production of a first amorphous layer on the first substrate and/or production of a second amorphous layer on the second substrate, bonding of the first substrate with the second substrate at the amorphous layer or at the amorphous layers to form a substrate stack, irradiation of the amorphous layer or the amorphous layers with radiation in such a way that the amorphous layer or the amorphous layers is/are transformed into a crystalline layer or crystalline layers.
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: January 2, 2024
    Assignee: EV Group E. Thallner GmbH
    Inventors: Kurt Hingerl, Peter Nikolaus Oberhumer, Gunther Hesser
  • Patent number: 11694977
    Abstract: In an embodiment a method includes providing the first component part with a partially exposed first insulating layer, a plurality of first through-vias and an exposed first contact layer structured in places and planarized in places, wherein the first through-vias are each laterally enclosed by the first insulating layer, and wherein the first contact layer partially covers the first insulating layer and completely covers the first through-vias; providing the second component part with a partially exposed second insulating layer, a plurality of second through-vias and an exposed second contact layer structured in places and planarized in places, wherein the second through-vias are each laterally enclosed by the second insulating layer, and wherein the second contact layer partially covers the second insulating layer and completely covers the second through-vias and joining the component parts such that the contact layers overlap each other thereby mechanically and electrically connecting the component parts
    Type: Grant
    Filed: May 8, 2019
    Date of Patent: July 4, 2023
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Simeon Katz, Sophia Huppmann, Michael Hoenle, Thorsten Wagner, Kurt Hingerl
  • Publication number: 20210202251
    Abstract: A method for bonding a first substrate with a second substrate, with the following sequence: production of a first amorphous layer on the first substrate and/or production of a second amorphous layer on the second substrate, bonding of the first substrate with the second substrate at the amorphous layer or at the amorphous layers to form a substrate stack, irradiation of the amorphous layer or the amorphous layers with radiation in such a way that the amorphous layer or the amorphous layers is/are transformed into a crystalline layer or crystalline layers.
    Type: Application
    Filed: February 12, 2021
    Publication date: July 1, 2021
    Applicant: EV Group E. Thallner GmbH
    Inventors: Kurt Hingerl, Peter Nikolaus Oberhumer, Gunther Hesser
  • Patent number: 10971365
    Abstract: A method for bonding a first substrate with a second substrate, with the following sequence: production of a first amorphous layer on the first substrate and/or production of a second amorphous layer on the second substrate, bonding of the first substrate with the second substrate at the amorphous layer or at the amorphous layers to form a substrate stack, irradiation of the amorphous layer or the amorphous layers with radiation in such a way that the amorphous layer or the amorphous layers is/are transformed into a crystalline layer or crystalline layers.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: April 6, 2021
    Assignee: EV Group E. Thallner GmbH
    Inventors: Kurt Hingerl, Peter Nikolaus Oberhumer, Gunther Hesser
  • Publication number: 20210035934
    Abstract: In an embodiment a method includes providing the first component part with a partially exposed first insulating layer, a plurality of first through-vias and an exposed first contact layer structured in places and planarized in places, wherein the first through-vias are each laterally enclosed by the first insulating layer, and wherein the first contact layer partially covers the first insulating layer and completely covers the first through-vias; providing the second component part with a partially exposed second insulating layer, a plurality of second through-vias and an exposed second contact layer structured in places and planarized in places, wherein the second through-vias are each laterally enclosed by the second insulating layer, and wherein the second contact layer partially covers the second insulating layer and completely covers the second through-vias and joining the component parts such that the contact layers overlap each other thereby mechanically and electrically connecting the component parts
    Type: Application
    Filed: May 8, 2019
    Publication date: February 4, 2021
    Inventors: Simeon Katz, Sophia Huppmann, Michael Hoenle, Thorsten Wagner, Kurt Hingerl
  • Patent number: 10825793
    Abstract: This invention relates to a method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate with the following steps, especially the following sequence: forming a reservoir in a surface layer on the first contact surface, the first surface layer consisting at least largely of a native oxide material, at least partial filling of the reservoir with a first educt or a first group of educts, the first contact surface making contact with the second contact surface for formation of a prebond connection, forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with a second educt contained in a reaction layer of the second substrate.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: November 3, 2020
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flötgen
  • Publication number: 20190393037
    Abstract: A method for bonding a first substrate with a second substrate, with the following sequence: production of a first amorphous layer on the first substrate and/or production of a second amorphous layer on the second substrate, bonding of the first substrate with the second substrate at the amorphous layer or at the amorphous layers to form a substrate stack, irradiation of the amorphous layer or the amorphous layers with radiation in such a way that the amorphous layer or the amorphous layers is/are transformed into a crystalline layer or crystalline layers.
    Type: Application
    Filed: February 21, 2017
    Publication date: December 26, 2019
    Applicant: EV Group E. Thallner GmbH
    Inventors: Kurt Hingerl, Peter Nikolaus Oberhumer, Gunther Hesser
  • Publication number: 20190006313
    Abstract: A method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate according to the following steps: forming a reservoir in a surface layer on the first contact surface, at least partially filling the reservoir with a first educt or a first group of educts, contacting the first contact surface with the second contact surface for formation of a prebond connection, and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with a second educt contained in a reaction layer of the second substrate.
    Type: Application
    Filed: August 21, 2018
    Publication date: January 3, 2019
    Applicant: EV GROUP E. THALLNER GMBH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flotgen
  • Patent number: 10163681
    Abstract: A method for bonding of a first solid substrate to a second solid substrate which contains a first material with the following steps, especially the following sequence: formation or application of a function layer which contains a second material to the second solid substrate, making contact of the first solid substrate with the second solid substrate on the function layer, pressing together the solid substrates for forming a permanent bond between the first and second solid substrate, at least partially reinforced by solid diffusion and/or phase transformation of the first material with the second material, an increase of volume on the function layer being caused.
    Type: Grant
    Filed: August 30, 2011
    Date of Patent: December 25, 2018
    Assignee: EV Group E. Thallner GmbH
    Inventors: Klaus Martinschitz, Markus Wimplinger, Bernhard Rebhan, Kurt Hingerl
  • Patent number: 10083933
    Abstract: A method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate according to the following steps: forming a reservoir in a surface layer on the first contact surface, at least partially filling the reservoir with a first educt or a first group of educts, contacting the first contact surface with the second contact surface for formation of a prebond connection, and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with a second educt contained in a reaction layer of the second substrate.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: September 25, 2018
    Assignee: EV GROUP E. THALLNER GMBH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flotgen
  • Publication number: 20170229423
    Abstract: This invention relates to a method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate with the following steps, especially the following sequence: forming a first reservoir in a surface layer on the first contact surface and a second reservoir in a surface layer on the second contact surface, the surface layers of the first and second contact surfaces being comprised of respective native oxide materials of one or more second educts respectively contained in reaction layers of the first and second substrates, partially filling the first and second reservoirs with one or more first educts; and reacting the first educts filled in the first reservoir with the second educts contained in the reaction layer of the second substrate to at least partially strengthen a permanent bond formed between the first and second contact surfaces.
    Type: Application
    Filed: April 27, 2017
    Publication date: August 10, 2017
    Applicant: EV GROUP E. THALLNER GmbH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flotgen
  • Publication number: 20160111394
    Abstract: A method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate according to the following steps: forming a reservoir in a surface layer on the first contact surface, at least partially filling the reservoir with a first educt or a first group of educts, contacting the first contact surface with the second contact surface for formation of a prebond connection, and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with a second educt contained in a reaction layer of the second substrate.
    Type: Application
    Filed: December 21, 2015
    Publication date: April 21, 2016
    Applicant: EV GROUP E. THALLNER GMBH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flotgen
  • Patent number: 9252042
    Abstract: A method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate according to the following steps: forming a reservoir in a surface layer on the first contact surface, at least partially filling the reservoir with a first educt or a first group of educts, contacting the first contact surface with the second contact surface for formation of a prebond connection, and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with a second educt contained in a reaction layer of the second substrate.
    Type: Grant
    Filed: January 25, 2011
    Date of Patent: February 2, 2016
    Assignee: EV Group E. Thallner GmbH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flötgen
  • Patent number: 9159717
    Abstract: This invention relates to a method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate, the second substrate having at least one reaction layer, with the following steps, especially the following sequence: forming a reservoir in a reservoir formation layer on the first contact surface, at least partial filling of the reservoir with a first educt or a first group of educts, the first contact surface making contact with the second contact surface for formation of a prebond connection, thinning of the second substrate and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with the second educt contained in the reaction layer of the second substrate.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: October 13, 2015
    Assignee: EV Group E. Thallner GmbH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flötgen
  • Publication number: 20150165752
    Abstract: A method for bonding of a first contact area of a first substrate to a second contact area of a second substrate, the second substrate having a least one reaction layer, and a device for carrying out said method. The method comprises: (a) accommodating the substrates between a first electrode and a second electrode, or within a coil, (b) formation of a reservoir on the first contact area by exposing the first contact area to a plasma (c) at least partially filling of the reservoir with a first educt or a first group of educts, (d) contacting the first contact area with the second contact area for formation of a pre-bond interconnection, (e) forming a permanent bond between the first and second contact areas at least partially strengthened by the reaction of the first educt with a second educt which is contained in the reaction layer of the second substrate.
    Type: Application
    Filed: July 24, 2012
    Publication date: June 18, 2015
    Applicant: EV Group E. Thallner GmbH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flötgen
  • Patent number: 8975158
    Abstract: A method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate. The method comprises: forming at least one reservoir in at least one reservoir formation layer on the first substrate and/or the second substrate, the reservoir comprised of an amorphous material, at least partial filling of the reservoir/reservoirs with a first educt or a first group of educts, forming or applying a reaction layer which contains a second educt or a second group of educts to the reservoir and/or the reservoir, the first contact surface making contact with the second contact surface for formation of a prebond connection, and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt or the first group with the second educt or the second group.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: March 10, 2015
    Assignee: EV Group E. Thallner GmbH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flötgen
  • Publication number: 20140154867
    Abstract: A method for bonding of a first solid substrate to a second solid substrate which contains a first material with the following steps, especially the following sequence: formation or application of a function layer which contains a second material to the second solid substrate, making contact of the first solid substrate with the second solid substrate on the function layer, pressing together the solid substrates for forming a permanent bond between the first and second solid substrate, at least partially reinforced by solid diffusion and/or phase transformation of the first material with the second material, an increase of volume on the function layer being caused.
    Type: Application
    Filed: August 30, 2011
    Publication date: June 5, 2014
    Inventors: Klaus Martinschitz, Markus Wimplinger, Bernhard Rebhan, Kurt Hingerl
  • Publication number: 20140073112
    Abstract: A method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate. The method comprises: forming at least one reservoir in at least one reservoir formation layer on the first substrate and/or the second substrate, the reservoir comprised of an amorphous material, at least partial filling of the reservoir/reservoirs with a first educt or a first group of educts, forming or applying a reaction layer which contains a second educt or a second group of educts to the reservoir and/or the reservoir, the first contact surface making contact with the second contact surface for formation of a prebond connection, and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt or the first group with the second educt or the second group.
    Type: Application
    Filed: April 8, 2011
    Publication date: March 13, 2014
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flötgen
  • Publication number: 20140051231
    Abstract: This invention relates to a method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate, the second substrate having at least one reaction layer, with the following steps, especially the following sequence: forming a reservoir in a reservoir formation layer on the first contact surface, at least partial filling of the reservoir with a first educt or a first group of educts, the first contact surface making contact with the second contact surface for formation of a prebond connection, thinning of the second substrate and forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with the second educt contained in the reaction layer of the second substrate.
    Type: Application
    Filed: April 8, 2011
    Publication date: February 20, 2014
    Applicant: EV GROUP E. THALLNER GMBH
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flötgen
  • Publication number: 20140017877
    Abstract: This invention relates to a method for bonding of a first contact surface of a first substrate to a second contact surface of a second substrate with the following steps, especially the following sequence: forming a reservoir in a surface layer on the first contact surface, the first surface layer consisting at least largely of a native oxide material, at least partial filling of the reservoir with a first educt or a first group of educts, the first contact surface making contact with the second contact surface for formation of a prebond connection, forming a permanent bond between the first and second contact surface, at least partially strengthened by the reaction of the first educt with a second educt contained in a reaction layer of the second substrate.
    Type: Application
    Filed: April 8, 2011
    Publication date: January 16, 2014
    Inventors: Thomas Plach, Kurt Hingerl, Markus Wimplinger, Christoph Flötgen