Patents by Inventor Kurumi YAGI
Kurumi YAGI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10424496Abstract: An upper end of a tubular member surrounding a common pipe line is closed by a lid member. The lid member has an opening formed therein for supplying liquids to adjacent the rotation center on the back surface of a wafer. Deionized water supplied at normal temperature to the interior of the tubular member, after serving to cool the common pipe line, flows out of a lower end of the tubular member.Type: GrantFiled: September 11, 2017Date of Patent: September 24, 2019Assignee: SCREEN Holdings Co., Ltd.Inventors: Masafumi Inoue, Akiyoshi Nakano, Kurumi Yagi
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Patent number: 10115610Abstract: A substrate processing apparatus includes a spin chuck, a shielding member disposed over the substrate, a cup surrounding a spin base, an upper gas valve that makes an inert gas be discharged from a downward discharge port of the shielding member, and an exhaust duct that discharges a gas in the cup. The shielding member includes an opposed surface disposed over the substrate and an inner peripheral surface surrounding the substrate. The lower end of the inner peripheral surface of the shielding member is disposed in the periphery of the spin base. The distance in the radial direction from the lower end of the inner peripheral surface of the shielding member to an outer peripheral surface of the spin base is not less than the distance in the vertical direction from an upper surface of the substrate to the opposed surface.Type: GrantFiled: January 30, 2015Date of Patent: October 30, 2018Assignee: SCREEN Holdings Co., Ltd.Inventor: Kurumi Yagi
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Publication number: 20170372921Abstract: An upper end of a tubular member surrounding a common pipe line is closed by a lid member. The lid member has an opening formed therein for supplying liquids to adjacent the rotation center on the back surface of a wafer. Deionized water supplied at normal temperature to the interior of the tubular member, after serving to cool the common pipe line, flows out of a lower end of the tubular member.Type: ApplicationFiled: September 11, 2017Publication date: December 28, 2017Inventors: Masafumi INOUE, Akiyoshi NAKANO, Kurumi YAGI
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Patent number: 9707063Abstract: A dental diagnosis device has an occlusion sound detection member that detects occlusion sounds by teeth and an analysis member that analyzes the teeth occlusion based on detected occlusion sounds by the occlusion detection member. The occlusion detection member comprises a sucker shaped suction member that sticks to a tooth, a hollow passage connected to a through-hole installed in the suction member and it is operably controlled to appropriate negative pressure by which the suction member is adhered to a tooth, and a detection member connected to the suction member, which detects occlusion sound via the suction member.Type: GrantFiled: March 29, 2013Date of Patent: July 18, 2017Assignee: NATIONAL UNIVERSITY CORPORATION OKAYAMA UNIVERSITYInventors: Shogo Minagi, Kazuhiro Oki, Yohei Kumazaki, Shuichi Wakimoto, Koichi Suzumori, Kurumi Yagi
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Patent number: 9343287Abstract: A substrate processing apparatus includes a plurality of chuck pins and a heat source. The chuck pin includes a conductive member made of a material containing carbon, and a pin cover that covers the conductive member. The conductive member includes a gripping portion softer than the substrate, the gripping portion to be pressed onto a peripheral edge portion of the substrate, and protrudes outward from an outer peripheral edge of the substrate in a plan view in a state where the gripping portion is pressed onto the peripheral edge portion of the substrate. The pin cover covers, in a plan view, the entire region of a part of the conductive member protruding outward from the outer peripheral edge of the substrate in a plan view in a state where the gripping portion is pressed onto the peripheral edge portion of the substrate.Type: GrantFiled: May 9, 2014Date of Patent: May 17, 2016Assignee: SCREEN Holdings Co., Ltd.Inventors: Akiyoshi Nakano, Kurumi Yagi
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Publication number: 20150270145Abstract: An upper end of a tubular member surrounding a common pipe line is closed by a lid member. The lid member has an opening formed therein for supplying liquids to adjacent the rotation center on the back surface of a wafer. Deionized water supplied at normal temperature to the interior of the tubular member, after serving to cool the common pipe line, flows out of a lower end of the tubular member.Type: ApplicationFiled: November 24, 2014Publication date: September 24, 2015Inventors: Masafumi INOUE, Akiyoshi NAKANO, Kurumi YAGI
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Publication number: 20150234296Abstract: A substrate processing apparatus includes a spin chuck, a shielding member disposed over the substrate, a cup surrounding a spin base, an upper gas valve that makes an inert gas be discharged from a downward discharge port of the shielding member, and an exhaust duct that discharges a gas in the cup. The shielding member includes an opposed surface disposed over the substrate and an inner peripheral surface surrounding the substrate. The lower end of the inner peripheral surface of the shielding member is disposed in the periphery of the spin base. The distance in the radial direction from the lower end of the inner peripheral surface of the shielding member to an outer peripheral surface of the spin base is not less than the distance in the vertical direction from an upper surface of the substrate to the opposed surface.Type: ApplicationFiled: January 30, 2015Publication date: August 20, 2015Inventor: Kurumi YAGI
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Publication number: 20150072312Abstract: A dental diagnosis device has an occlusion sound detection member that detects occlusion sounds by teeth and an analysis member that analyzes the teeth occlusion based on detected occlusion sounds by the occlusion detection member. The occlusion detection member comprises a sucker shaped suction member that sticks to a tooth, a hollow passage connected to a through-hole installed in the suction member and it is operably controlled to appropriate negative pressure by which the suction member is adhered to a tooth, and a detection member connected to the suction member, which detects occlusion sound via the suction member.Type: ApplicationFiled: March 29, 2013Publication date: March 12, 2015Applicant: National University Corporation Okayama UniversityInventors: Shogo Minagi, Kazuhiro Oki, Yohei Kumazaki, Shuichi Wakimoto, Koichi Suzumori, Kurumi Yagi
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Publication number: 20140331927Abstract: A substrate processing apparatus includes a plurality of chuck pins and a heat source. The chuck pin includes a conductive member made of a material containing carbon, and a pin cover that covers the conductive member. The conductive member includes a gripping portion softer than the substrate, the gripping portion to be pressed onto a peripheral edge portion of the substrate, and protrudes outward from an outer peripheral edge of the substrate in a plan view in a state where the gripping portion is pressed onto the peripheral edge portion of the substrate. The pin cover covers, in a plan view, the entire region of a part of the conductive member protruding outward from the outer peripheral edge of the substrate in a plan view in a state where the gripping portion is pressed onto the peripheral edge portion of the substrate.Type: ApplicationFiled: May 9, 2014Publication date: November 13, 2014Applicant: DAINIPPON SCREEN MFG. CO., LTD.Inventors: Akiyoshi NAKANO, Kurumi YAGI