Abstract: A method for forming a piezoelectric/electrostrictive actuator in which a piezoelectric/electrostrictive file is formed on a vibrating plate or lower electrode by applying a layer of a ceramic paste theron and baking the paste layer at a low temperature in a range below 300° C. to form the film to its final thickness all in one step.

Abstract: A piezoelectric/electrostrictive actuator and a method for fabricating the actuator are disclosed. The piezoelectric/electrostrictive actuator includes a vibrating plate made of metal, ceramic or resin. The actuator also optionally include a lower electrode formed on the vibrating plate. The actuator further includes a piezoelectric/electrostrictive thin or thick film formed on the vibrating plate or lower electrode by use of ceramic paste. The ceramic paste is produced by preparing ceramic oxide powder having a grain size of 5 &mgr;m or less and containing lead (Pb) and titanium (Ti) as basic elements thereof, said ceramic oxide powder being produced by a non-explosive oxidative-reductive combustion reaction carried out at a temperature of 100 to 500° C., preparing an organic solvent or water-based ceramic sol solution containing constituent ceramic elements identical or similar to those of said ceramic oxide powder, and mixing said ceramic oxide powder with said ceramic sol solution.