Patent number: 7452818
Abstract: The disclosure provides a method for manufacturing a semiconductor device. The method, in one embodiment, includes forming semiconductor features (405, 410, 415, 420, 425, 430, 435, 440, 445) over a substrate (310), and then forming a layer of material (510) over the semiconductor features (405, 410, 415, 420, 425, 430, 435, 440, 445). This method further includes selectively etching portions of the layer of material (510) based upon a density or size of the semiconductor features (405, 410, 415, 420, 425, 430, 435, 440, 445) located thereunder, and then polishing remaining portions of the layer of material (510).
Type:
Grant
Filed:
March 30, 2007
Date of Patent:
November 18, 2008
Assignee:
Texas Instruments Incorporated
Inventors:
Kyle Hunt, Neel Bhatt, Asadd M. Hosein, Brian L. Vialpando, William R. Morrison
Publication number: 20080242007
Abstract: The disclosure provides a method for manufacturing a semiconductor device. The method, in one embodiment, includes forming semiconductor features (405, 410, 415, 420, 425, 430, 435, 440, 445) over a substrate (310), and then forming a layer of material (510) over the semiconductor features (405, 410, 415, 420, 425, 430, 435, 440, 445). This method further includes selectively etching portions of the layer of material (510) based upon a density or size of the semiconductor features (405, 410, 415, 420, 425, 430, 435, 440, 445) located thereunder, and then polishing remaining portions of the layer of material (510).
Type:
Application
Filed:
March 30, 2007
Publication date:
October 2, 2008
Applicant:
Texas Instruments Incorporated
Inventors:
Kyle Hunt, Neel Bhatt, Asadd M. Hosein, Brian L. Vialpando, William R. Morrison
Publication number: 20070026769
Abstract: The present invention provides a method for planarizing/polishing a surface, a method for manufacturing an integrated circuit and a chemical mechanical polishing apparatus. The method for planarizing/polishing a surface, among other elements, includes providing a chemical mechanical polishing apparatus (200, 300, 400) having a polishing platen (210, 310, 410), a carrier head (220, 320, 420) positioned over the polishing platen (210, 310, 410), and a slurry delivery source (230, 330, 430) positioned over and off center the polishing platen (210, 310, 410), and rotating the polishing platen (210, 310, 410) in a direction (Rp2, Rp3, Rp4) such that slurry exiting the slurry delivery source (230, 330, 430) and contacting the polishing platen (210, 310, 410) must rotate an angle (?2, ?3, ?4) less than about 220 degrees before contacting a polishable surface maintained by the carrier head (220, 320, 420).
Type:
Application
Filed:
July 28, 2005
Publication date:
February 1, 2007
Applicant:
Texas Instruments, Incorporated
Inventors:
Eugene Davis, Kyle Hunt, Daniel Caldwell