Abstract: The manufacturing method uses a substrate including an SOI layer (112), a SiO2 layer (114) and a Si layer (116). A lens surface (118) is formed on the surface of the SOI layer (112) of the substrate. A lens region including the lens surface (118) and an edge section (120) there around is formed by removing the SOI layer (112), with the exception of a section corresponding to the lens region, until the SiO2 layer (114) is exposed, such that the SOI layer (112) only remains in the lens region. A lens holding section (122) that holds the lens region is formed by removing the Si layer (116), with the exception of a section of the Si layer (116) corresponding to the lens holding section (122), until the SiO2 layer (114) is exposed at the rear surface of the substrate.

Abstract: Forming a resist pattern on a substrate by patterning a resist layer using a photomask. The photomask comprises a mask substrate and a plurality of mask cells arranged in matrix form and in close contact with each other. Each of the mask cells has one or both of a light transmission region and a light-shielding region formed by a light-shielding film provided at the mask substrate. A light intensity of light that is transmitted through the mask cells is a normalized light intensity, and the light intensity of the light that is transmitted through the plurality of mask cells varies. The patterning of the substrate is performed using the resist pattern as an etching mask.

Abstract: The manufacturing method uses a substrate including an SOI layer (112), a SiO2 layer (114) and a Si layer (116). A lens surface (118) is formed on the surface of the SOI layer (112) of the substrate. A lens region including the lens surface (118) and an edge section (120) there around is formed by removing the SOI layer (112), with the exception of a section corresponding to the lens region, until the SiO2 layer (114) is exposed, such that the SOI layer (112) only remains in the lens region. A lens holding section (122) that holds the lens region is formed by removing the Si layer (116), with the exception of a section of the Si layer (116) corresponding to the lens holding section (122), until the SiO2 layer (114) is exposed at the rear surface of the substrate.

Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by chucking vacuum suction and so forth. The lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, and thus the lens element 1 is neither damaged nor contaminated, and stably handled with ease.

Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by chucking vacuum suction and so forth. The lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, and thus the lens element 1 is neither damaged nor contaminated, and stably handled with ease.

Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by chucking vacuum suction and so forth. The lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, and thus the lens element 1 is neither damaged nor contaminated, and stably handled with ease.

Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by using a grasping means, a vacuum sucking means and so forth. With this, the lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, thus the lens element 1 being neither damaged nor contaminated, and being stably handled with ease.

Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by using a grasping means, a vacuum sucking means and so forth. With this, the lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, thus the lens element 1 being neither damaged nor contaminated, and being stably handled with ease.

Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by using a grasping means, a vacuum sucking means and so forth. With this, the lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, thus the lens element 1 being neither damaged nor contaminated, and being stably handled with ease.

Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by using a grasping means, a vacuum sucking means and so forth. With this, the lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, thus the lens element 1 being neither damaged nor contaminated, and being stably handled with ease.

Abstract: A lens element 1 is formed by making use of an optical substrate, and includes a lens portion 2, an edge portion 6 in the form of a circular arc provided along the circumference of the lens portion 2, and a handling portion 4 which is integrated with the lens portion 2 and the edge portion 6 as well and extends with a width wider than that of the lens portion 2. The handling portion 4 can be caught and held by using a grasping means, a vacuum sucking means and so forth. With this, the lens element 1 can be handled by catching the handling portion 4 without directly touching the lens element 1, thus the lens element 1 being neither damaged nor contaminated, and being stably handled with ease.

Abstract: An optical device receives light from an adjustable light source, focuses part of the light into an optical waveguide, and directs another part of the light toward a control unit as monitor light for feedback control of the light source. The optical device is an optical plate with a computer-generated hologram formed on at least one surface to focus light into the optical waveguide. The monitor light may be reflected at this surface or another surface of the optical plate. The monitor light may be focused by the same or another computer-generated hologram.