Abstract: A method and apparatus for forming tungsten features in semiconductor devices is provided. The method includes exposing a top opening of a feature formed in a substrate to a physical vapor deposition (PVD) process to deposit a tungsten liner layer within the feature. The PVD process is performed in a first processing region of a first processing chamber and the tungsten liner layer forms an overhang portion, which partially obstructs the top opening of the feature. The substrate is transferred from the first processing region of the first processing chamber to a second processing region of a second processing chamber without breaking vacuum. The overhang portion is exposed to nitrogen-containing radicals in the second processing region to inhibit subsequent growth of tungsten along the overhang portion. The feature is exposed to a tungsten-containing precursor gas to form a tungsten fill layer over the tungsten liner layer within the feature.

Abstract: The present invention relates to an apparatus for connecting connection parts between power apparatuses. The apparatus of the present invention comprises: a cable constituted by a conductive wire, and an outer coating which covers the conductive wire; socket means having a first housing, and a conductive connection element which is arranged in the first housing and which has an insertion groove, wherein the socket means is installed in a power apparatus to form a connection part for electrically connecting the cable to the power apparatus; and plug means which has a conductive ring fitted to the conductive wire exposed by removing the outer coating from one end of the cable, and which is arranged at the cable and fitted to the first housing of the socket means such that the conductive ring is inserted into the insertion groove of the conductive connection element so as to electrically connect the cable to the power apparatus.

Abstract: The embodiment is to provide a liquid crystal display device capable of detecting malfunctions. The liquid crystal display device includes pixels configured to be connected to scan lines and data lines, data pads electrically connected to the data lines, a data integrated circuit supplying data signals to the data lines through the data pads, first data transistors coupled to the data pads, and second data transistors coupled to the data lines. The first data transistors are disposed on the data integrated circuit and the second data transistors are separated from the data integrated circuit.

Abstract: A testing apparatus for testing an organic light-emitting display apparatus including: a test chamber for retaining a first substrate having a plurality of exposed cells, each cell including an organic emission unit; a stage in the test chamber, the stage configured to support the first substrate; a plurality of probe bars, each of the probe bars including a plurality of probe blocks for respectively contacting the exposed plurality of cells of the first substrate to supply an external signal to the exposed plurality of cells; a probe bar moving unit coupled to the probe bar; and a probe bar supply unit including the plurality of probe bars, wherein the probe bar moving unit is configured to move a probe bar to and from the stage and to and from the supply unit to obtain and unload a probe bar.

Abstract: The present invention relates to an apparatus for connecting connection parts between power apparatuses. The apparatus of the present invention comprises: a cable constituted by a conductive wire, and an outer coating which covers the conductive wire; socket means having a first housing, and a conductive connection element which is arranged in the first housing and which has an insertion groove, wherein the socket means is installed in a power apparatus to form a connection part for electrically connecting the cable to the power apparatus; and plug means which has a conductive ring fitted to the conductive wire exposed by removing the outer coating from one end of the cable, and which is arranged at the cable and fitted to the first housing of the socket means such that the conductive ring is inserted into the insertion groove of the conductive connection element so as to electrically connect the cable to the power apparatus.

Abstract: The embodiment is to provide a liquid crystal display device capable of detecting malfunctions. The liquid crystal display device includes pixels configured to be connected to scan lines and data lines, data pads electrically connected to the data lines, a data integrated circuit supplying data signals to the data lines through the data pads, first data transistors coupled to the data pads, and second data transistors coupled to the data lines. The first data transistors are disposed on the data integrated circuit and the second data transistors are separated from the data integrated circuit.

Abstract: A test system includes a rotatable turntable, a loading section, a first image pickup section, a second image pickup section, a system control section and an unloading section. The loading section loads a display panel assembly onto the stage. The loading section recognizes a unique number of the display panel assembly. The first image pickup section obtains an active area image data from an active area image. A valid first active area defect is detected using an active area image data obtained from an active area image displayed on the display panel assembly. An inactive area defect is detected based on an inactive area image data and a reference inactive area image data.

Abstract: A test system includes a rotatable turntable, a loading section, a first image pickup section, a second image pickup section, a system control section and an unloading section. The loading section loads a display panel assembly onto the stage. The loading section recognizes a unique number of the display panel assembly. The first image pickup section obtains an active area image data from an active area image. A valid first active area defect is detected using an active area image data obtained from an active area image displayed on the display panel assembly. An inactive area defect is detected based on an inactive area image data and a reference inactive area image data.

Abstract: A probe control method of a probe station which levels the probe pins before testing a large area substrate such as a thin film transistor circuit substrate using a probe station, which includes the steps of connecting a pin of a probe station to a resistance material; measuring and reading the resistance between adjacent pins using a resistance measuring device; and leveling the probe pins using a pin control device at the probe station.