Patents by Inventor Kyoung Sup Shim

Kyoung Sup Shim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photoresist dispensing device
    Patent number: 6332924
    Abstract: A photoresist dispensing device for use in applying a metered amount of photoresist on a wafer comprises, a photoresist storage tank, a nozzle for spraying the photoresist on the wafer, a feeder unit for drawing a metered amount of the photoresist out of the storage tank and discharging it through the nozzle, a pneumatic control unit for controlling the operation of the feeder unit with the use of pressurized air; and a filter disposed in between the storage tank and the feeder unit for removing alien matters present the photoresist.
    Type: Grant
    Filed: February 18, 2000
    Date of Patent: December 25, 2001
    Assignee: Taeyang Tech Co., Ltd.
    Inventors: Kyoung Sup Shim, Jong Suk Kim