Abstract: Disclosed is a method of forming a thin film using a chemical purge material, the method comprising supplying a metal precursor to the inside of a chamber oh which a substrate is placed; purging the interior of the chamber; supplying a reactant to the inside of the chamber so that the reactant reacts with the metal precursor to form the thin film; and supplying a chemical purge material to the inside of the chamber so that a portion of the reactant is removed.

Abstract: A sterilization module including a main body, a circuit board disposed in the main body, a light source disposed on the circuit board to emit sterilizing light, and a transparent unit to protect the light source from an outside and including a material that transmits the sterilizing light, in which the light source includes a mesa including a first semiconductor layer, an active layer, and a second semiconductor layer, a first electrode electrically connected to the first semiconductor layer, and a second electrode disposed on the second semiconductor layer and electrically connected to the second semiconductor layer, in which the first electrode includes a first contact region disposed on the outer area of the first semiconductor layer and a second contact region at least partially surrounded by the mesa, and a distance between the transparent unit and the circuit board is greater than a height of the light source.

Abstract: A semiconductor device including a first interlayer insulating film; a conductive pattern in the first interlayer insulating film; a resistance pattern on the conductive pattern; an upper etching stopper film spaced apart from the resistance pattern, extending in parallel with a top surface of the resistance pattern, and including a first metal; a lower etching stopper film on the conductive pattern, extending in parallel with a top surface of the first interlayer insulating film, and including a second metal; and a second interlayer insulating film on the upper etching stopper film and the lower etching stopper film, wherein a distance from a top surface of the second interlayer insulating film to a top surface of the upper etching stopper film is smaller than a distance from the top surface of the second interlayer insulating film to a top surface of the lower etching stopper film.

Abstract: Discussed are a light-emitting device and a light-emitting display device having improved efficiency and increased lifespan. A plurality of stacks is provided between an anode and a cathode for at least a subpixel to emit a predetermined color, and emissive layers in different stacks include the same color-based materials having different luminous properties.

Abstract: A sensor network and method for task maintenance query using a query cache are provided. When a query generated by a user is transmitted through a relay node to a sensor node, the relay node can accurately transmit the query to a newly installed sensor node or a sensor node moving from another area to a specific area using a query cache. Thus, the reliability of the transmission of the query can be improved, and thus a task of the query can be maintained.

Abstract: A method of processing emergent data in a wireless sensor network is provided in which the latest information is collected from each sensor node and stored, newly-received sensing data are determined as emergent data if an error is over a certain value compared to the latest information from each node, and the emergent data are added with average data of neighbor nodes and transmitted to a sink node. Accordingly, whether neighbor sensor nodes are normal in a wireless sensor network can be determined and managed. An intermediate node can process emergent data generated from each sensor node and separate data by a sensor malfunction or urgent data so that a malfunction of each sensor node can be easily determined and reliability of sensing data of each sensor node can be improved.