Patents by Inventor Lane S. Lathrop

Lane S. Lathrop has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reducing plating anomalies in electroplated fine geometry conductive features
    Patent number: 4988413
    Abstract: An etching process provides a surface of a seed layer substantially free of surface anomalies that could effect the morphology of conductive features that are electroplated onto the surface of the seed layer between dielectric features photolithographically patterned in a dielectric composition. The etching serves to remove at least several monolayers from the upper surface of the seed layer. The conductive features electroplated thereon exhibit excellent morphology and edges that are substantially free of surface roughness and nodular film growth.
    Type: Grant
    Filed: February 17, 1989
    Date of Patent: January 29, 1991
    Assignee: The Boeing Company
    Inventors: Kishore K. Chakravorty, Lane S. Lathrop