Abstract: A sensor module may be formed including a core of ferromagnetic material associated with a wire coil forming a passive inductor resonant circuit, which may be used in temperature sensor modules and pressure sensor modules suitable for use in high temperature, high pressure, and corrosive environments. The passive inductor resonant circuits of the sensors may be tuned such that its resonant frequency is in a bounded frequency band interrogable with an electromagnetic energy signal having a frequency of less than or equal to about 10 MHz. Such sensors may be disposed in series in a sensor array, interrogable with an interrogation module, where the interrogation module may demultiplex, the frequencies of the multiple sensors to determine the environmental conditions sensed by the individual sensors.

Abstract: An apparatus, system and method are described that enable an impedance of a plasma load to be matched with a power generator. In some embodiments the apparatus includes a power output adapted to apply power that is utilized to energize a plasma; a sensor adapted to sample power applied at the power output so as to obtain power samples; and an impedance control output configured to provide, responsive to the power samples, an impedance-control signal that enables an impedance matching network connected to the output of the power generator and to the impedance control output to match, responsive to the an impedance-control signal, the impedance of the plasma to the operating impedance of the power generator.

Abstract: An apparatus, system and method are described that enable an impedance of a plasma load to be matched with a power generator. In some embodiments the apparatus includes a power output adapted to apply power that is utilized to energize a plasma; a sensor adapted to sample power applied at the power output so as to obtain power samples; and an impedance control output configured to provide, responsive to the power samples, an impedance-control signal that enables an impedance matching network connected to the output of the power generator and to the impedance control output to match, responsive to the an impedance-control signal, the impedance of the plasma to the operating impedance of the power generator.