Abstract: A gas injector for processing a substrate includes a body having an inlet connectable to a gas source that is configured to provide a gas flow in a first direction into the inlet when processing a substrate on a substrate support disposed within a processing volume of a processing chamber, and an a gas injection channel formed in the body. The gas injection channel is in fluid communication with the inlet and configured to deliver the gas flow to an inlet of the processing chamber. The gas injection channel has a first interior surface and a second interior surface that are parallel to a second direction and a third direction. The second and third directions are misaligned with a center of the substrate, and are at an angle to the first direction towards a first edge of the substrate support.

Abstract: The invention provides a complete, one-step, fully functional, ready to use lateral flow assay device for the rapid, accurate detection of a target nucleic acid in a fluid sample, wherein the device contains all reagents necessary for the assay in an anhydrous format. The device comprises a sample receiving zone, a labeling zone, and a capture zone. The sample receiving zone may contain one or more oligonucleotides coupled to binding partners and reversibly bound to the capture zone membrane, the labeling zone comprises a visible moiety coupled to a ligand specific for one of the binding partners and reversibly bound to the labeling zone membrane, and the capture zone comprises an capture moiety specific for the second binding partner and immobilized on the capture zone membrane.