Patents by Inventor Larry J. Fisk
Larry J. Fisk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11935726Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.Type: GrantFiled: September 21, 2021Date of Patent: March 19, 2024Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron M. Burry, Jonathan W. Smyka, Alexei Marakhtanov, Bing Ji, Felix Leib Kozakevich, John Holland, Ranadeep Bhowmick
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Patent number: 11536755Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.Type: GrantFiled: May 29, 2020Date of Patent: December 27, 2022Assignee: MKS Instruments, Inc.Inventors: Larry J. Fisk, II, Benjamin J. Gitlin, Mariusz Oldziej, Aaron M. Burry, Matthew G. Harrington, Aaron T. Radomski
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Patent number: 11367592Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: GrantFiled: June 18, 2020Date of Patent: June 21, 2022Assignee: MKS Instruments, Inc.Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathan W. Smyka
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Publication number: 20220005674Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.Type: ApplicationFiled: September 21, 2021Publication date: January 6, 2022Inventors: Aaron T. RADOMSKI, Benjamin J. GITLIN, Larry J. FISK, II, Mariusz OLDZIEJ, Aaron M. BURRY, Jonathan W. SMYKA, Alexei MARAKHTANOV, Bing JI, Felix Leib KOZAKEVICH, John HOLLAND, Ranadeep BHOWMICK
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Publication number: 20210373054Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.Type: ApplicationFiled: May 29, 2020Publication date: December 2, 2021Inventors: Larry J. FISK, II, Benjamin J. GITLIN, Mariusz OLDZIEJ, Aaron M. BURRY, Matthew G. HARRINGTON, Aaron T. RADOMSKI
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Patent number: 11158488Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.Type: GrantFiled: June 26, 2019Date of Patent: October 26, 2021Assignees: MKS Instruments, Inc., Lam Research CorporationInventors: Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron M. Burry, Jonathan W. Smyka, Alexei Marakhtanov, Bing Ji, Felix Leib Kozakevich, John Holland, Ranadeep Bhowmick
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Patent number: 10930470Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: GrantFiled: December 11, 2019Date of Patent: February 23, 2021Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
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Publication number: 20210013007Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: ApplicationFiled: June 18, 2020Publication date: January 14, 2021Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
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Publication number: 20200411289Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.Type: ApplicationFiled: June 26, 2019Publication date: December 31, 2020Inventors: Aaron T. RADOMSKI, Benjamin J. GITLIN, Larry J. FISK, II, Mariusz OLDZIEJ, Aaron M. BURRY, Jonathan W. SMYKA, Alexei MARAKHTANOV, Bing JI, Felix Leib KOZAKEVICH, John HOLLAND, Ranadeep BHOWMICK
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Patent number: 10727027Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: GrantFiled: February 12, 2019Date of Patent: July 28, 2020Assignee: MKS Instruments, Inc.Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathan W. Smyka
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Publication number: 20200144025Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: ApplicationFiled: December 11, 2019Publication date: May 7, 2020Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
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Patent number: 10546724Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: GrantFiled: May 9, 2018Date of Patent: January 28, 2020Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
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Publication number: 20190214231Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: ApplicationFiled: February 12, 2019Publication date: July 11, 2019Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
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Patent number: 10217609Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: GrantFiled: June 12, 2018Date of Patent: February 26, 2019Assignee: MKS Instruments, Inc.Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathon W. Smyka
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Publication number: 20180330921Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: ApplicationFiled: May 9, 2018Publication date: November 15, 2018Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
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Publication number: 20180294141Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: ApplicationFiled: June 12, 2018Publication date: October 11, 2018Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
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Patent number: 10049857Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: GrantFiled: November 30, 2015Date of Patent: August 14, 2018Assignee: MKS Instruments, Inc.Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathan Smyka
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Patent number: 9947514Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.Type: GrantFiled: August 15, 2016Date of Patent: April 17, 2018Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Sang Won Lee, Larry J. Fisk, II, Jonathan W. Smyka
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Publication number: 20170062187Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.Type: ApplicationFiled: August 15, 2016Publication date: March 2, 2017Applicant: MKS Instruments, Inc.Inventors: Aaron T. RADOMSKI, Sang Won LEE, Larry J. FISK, II, Jonathan W. SMYKA
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Publication number: 20160163514Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: ApplicationFiled: November 30, 2015Publication date: June 9, 2016Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan SMYKA