Patents by Inventor Larry Rhodes
Larry Rhodes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9952507Abstract: Embodiments in accordance with the present invention encompass self-imageable polymer compositions containing a variety of photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays. The compositions of this invention can be tailored to form positive tone or negative tone images depending upon the intended application in aqueous developable medium. The images formed therefrom exhibit improved properties including low wafer stress and better thermo-mechanical properties, among other property enhancements.Type: GrantFiled: February 12, 2016Date of Patent: April 24, 2018Assignee: PROMERUS, LLCInventors: Pramod Kandanarachchi, Larry Rhodes, Hendra Ng, Wei Zhang, Brian Knapp
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Publication number: 20160238932Abstract: Embodiments in accordance with the present invention encompass self-imageable polymer compositions containing a variety of photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays. The compositions of this invention can be tailored to form positive tone or negative tone images depending upon the intended application in aqueous developable medium. The images formed therefrom exhibit improved properties including low wafer stress and better thermo-mechanical properties, among other property enhancements.Type: ApplicationFiled: February 12, 2016Publication date: August 18, 2016Inventors: PRAMOD KANDANARACHCHI, LARRY RHODES, HENDRA NG, WEI ZHANG, BRIAN KNAPP
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Patent number: 9117861Abstract: Embodiments in accordance with the present invention provide for materials, methods for using such materials and structures that both incorporate such materials and are made using such methods that can be smoothly debonded at or near room temperature while providing a fixable bond that allows for wafer processing such as wafer thinning, anisotropic dry etching and chemical resistance during plating and etching.Type: GrantFiled: February 27, 2014Date of Patent: August 25, 2015Inventors: Venkat Dukkipati, Kei Kawasaki, Larry Rhodes, Toshihiro Sato
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Publication number: 20140178701Abstract: Embodiments in accordance with the present invention provide for materials, methods for using such materials and structures that both incorporate such materials and are made using such methods that can be smoothly debonded at or near room temperature while providing a fixable bond that allows for wafer processing such as wafer thinning, anisotropic dry etching and chemical resistance during plating and etching.Type: ApplicationFiled: February 27, 2014Publication date: June 26, 2014Applicants: SUMITOMO BAKELITE CO., LTD., PROMERUS, LLCInventors: Venkat DUKKIPATI, Kei KAWASAKI, Larry RHODES, Toshihiro SATO
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Patent number: 8753790Abstract: Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices.Type: GrantFiled: June 30, 2010Date of Patent: June 17, 2014Assignee: Promerus, LLCInventors: Osamu Onishi, Haruo Ikeda, Larry Rhodes, Paul Evans, Edmund Elce, Andrew Bell, Chad Brick, Hendra Ng, Pramod Kandanarachchi
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Patent number: 8715900Abstract: Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.Type: GrantFiled: July 16, 2012Date of Patent: May 6, 2014Assignees: Promerus, LLC, Sumitomo Bakelite Co., Ltd.Inventors: Osamu Onishi, Haruo Ikeda, Nobuo Tagashira, Larry Rhodes, Pramod Kandanarachchi
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Patent number: 8420293Abstract: Embodiments in accordance with the present invention provide waveguide structures and methods of forming such structures where core and laterally adjacent cladding regions are defined. Some embodiments of the present invention provide waveguide structures where core regions are collectively surrounded by laterally adjacent cladding regions and cladding layers and methods of forming such structures.Type: GrantFiled: August 10, 2011Date of Patent: April 16, 2013Assignees: Sumitomo Bakelite Co., Ltd., Promerus, LLCInventors: Koji Choki, Tetsuya Mori, Ramakrishna Ravikiran, Makoto Fujiwara, Keizo Takahama, Kei Watanabe, Hirotaka Nonaka, Yumiko Otake, Andrew Bell, Larry Rhodes, Dino Amoroso, Mutsuhiro Matsuyama
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Publication number: 20130017488Abstract: Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.Type: ApplicationFiled: July 16, 2012Publication date: January 17, 2013Applicants: Promerus LLC, Sumitomo Bakelite Co., Ltd.Inventors: Osamu Onishi, Haruo Ikeda, Nobuo Tagashira, Larry Rhodes, Pramod Kandanarachchi
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Publication number: 20120064458Abstract: Embodiments in accordance with the present invention provide waveguide structures and methods of forming such structures where core and laterally adjacent cladding regions are defined. Some embodiments of the present invention provide waveguide structures where core regions are collectively surrounded by laterally adjacent cladding regions and cladding layers and methods of forming such structures.Type: ApplicationFiled: August 10, 2011Publication date: March 15, 2012Applicants: PROMERUS, LLC, SUMITOMO BAKELITE COMPANY LIMITEDInventors: Koji CHOKI, Tetsuya Mori, Ramakrishna Ravikiran, Makoto Fujiwara, Keizo Takahama, Kei Watanabe, Hirotaka Nonaka, Yumiko Otake, Andrew Bell, Larry Rhodes, Dino Amoroso, Mutsuhiro Matsuyama
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Patent number: 8053166Abstract: Embodiments in accordance with the present invention provide waveguide structures and methods of forming such structures where core and laterally adjacent cladding regions are defined. Some embodiments of the present invention provide waveguide structures where core regions are collectively surrounded by laterally adjacent cladding regions and cladding layers and methods of forming such structures.Type: GrantFiled: September 3, 2009Date of Patent: November 8, 2011Assignees: Sumitomo Bakelite Co. Ltd., Promerus, LLC.Inventors: Koji Choki, Tetsuya Mori, Ramakrishna Ravikiran, Makoto Fujiwara, Keizo Takahama, Kei Watanabe, Hirotaka Nonaka, Yumiko Otake, Andrew Bell, Larry Rhodes, Dino Amoroso, Mutsuhiro Matsuyama
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Patent number: 8021825Abstract: Embodiments in accordance with the present invention provide waveguide structures and methods of forming such structures where core and laterally adjacent cladding regions are defined. Some embodiments of the present invention provide waveguide structures where core regions are collectively surrounded by laterally adjacent cladding regions and cladding layers and methods of forming such structures.Type: GrantFiled: September 3, 2009Date of Patent: September 20, 2011Assignees: Sumitomo Bakelite Co., Ltd., Promerus, LLC.Inventors: Koji Choki, Tetsuya Mori, Ramakrishna Ravikiran, Makoto Fujiwara, Keizo Takahama, Kei Watanabe, Hirotaka Nonaka, Yumiko Otake, Andrew Bell, Larry Rhodes, Dino Amoroso, Mutsuhiro Matsuyama
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Publication number: 20110104614Abstract: Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices.Type: ApplicationFiled: June 30, 2010Publication date: May 5, 2011Inventors: Osamu Onishi, Haruo Ikeda, Larry Rhodes, Paul Evans, Edmund Elce, Andrew Bell, Chad Brick, Hendra Ng, Pramod Kandanarachchi
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Patent number: 7820356Abstract: Embodiments in accordance with the present invention provide waveguide structures and methods of forming such structures where core and laterally adjacent cladding regions are defined. Some embodiments of the present invention provide waveguide structures where core regions are collectively surrounded by laterally adjacent cladding regions and cladding layers and methods of forming such structures.Type: GrantFiled: November 22, 2004Date of Patent: October 26, 2010Assignees: Sumitomo Bakelite Co. Ltd., Promerus, LLCInventors: Koji Choki, Tetsuya Mori, Ramakrishna Ravikiran, Makoto Fujiwara, Keizo Takahama, Kei Watanabe, Hirotaka Nonaka, Yumiko Otake, Andrew Bell, Larry Rhodes, Dino Amoroso, Mutsuhiro Matsuyama
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Publication number: 20100061688Abstract: Embodiments in accordance with the present invention provide waveguide structures and methods of forming such structures where core and laterally adjacent cladding regions are defined. Some embodiments of the present invention provide waveguide structures where core regions are collectively surrounded by laterally adjacent cladding regions and cladding layers and methods of forming such structures.Type: ApplicationFiled: September 3, 2009Publication date: March 11, 2010Applicants: SUMITOMO BAKELITE CO., LTD., PROMERUS, LLCInventors: Koji Choki, Tetsuya Mori, Ramakrishna Ravikiran, Makoto Fujiwara, Keizo Takahama, Kei Watanabe, Hirotaka Nonaka, Yumiko Otake, Andrew Bell, Larry Rhodes, Dino Amoroso, Mutsuhiro Matsuyama
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Publication number: 20100062378Abstract: Embodiments in accordance with the present invention provide waveguide structures and methods of forming such structures where core and laterally adjacent cladding regions are defined. Some embodiments of the present invention provide waveguide structures where core regions are collectively surrounded by laterally adjacent cladding regions and cladding layers and methods of forming such structures.Type: ApplicationFiled: September 3, 2009Publication date: March 11, 2010Applicants: SUMITOMO BAKELITE CO., LTD., PROMERUS, LLCInventors: Koji Choki, Tetsuya Mori, Ramakrishna Ravikiran, Makoto Fujiwara, Keizo Takahama, Kei Watanabe, Hirotaka Nonaka, Yumiko Otake, Andrew Bell, Larry Rhodes, Dino Amoroso, Mutsuhiro Matsuyama
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Publication number: 20070148566Abstract: Embodiments in accordance with the present invention provide waveguide structures and methods of forming such structures where core and laterally adjacent cladding regions are defined. Some embodiments of the present invention provide waveguide structures where core regions are collectively surrounded by laterally adjacent cladding regions and cladding layers and methods of forming such structures.Type: ApplicationFiled: November 22, 2004Publication date: June 28, 2007Applicant: SUMITOMO BAKELITE CO., LTD.Inventors: Koji Choki, Tetsuya Mori, Ramakrishna Ravikiran, Makoto Fujiwara, Keizo Takahama, Kei Watanabe, Hirotaka Nonaka, Yumiko Otake, Andrew Bell, Larry Rhodes, Dino Amoroso, Mutsuhiro Matsuyama
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Publication number: 20070066775Abstract: A method of polymerizing poly(cyclic)olefin monomers encompassing (a) combining a monomer composition containing the poly(cyclic)olefin monomers, a non-olefinic chain transfer agent and an activator compound to form a mixture; (b) heating the mixture; and (c) adding a polymerization catalyst containing Ni and/or Pd. The non-olefinic chain transfer agent includes one or more compounds selected from H2, alkylsilanes, alkylalkoxysilanes, alkylgermanes, alkylalkoxygermanes, alkylstannanes, and alkylalkoxystannanes. The activator is characterized as having an active hydrogen with a pKa of at least 5. The resulting poly(cyclic)olefin polymers can be used in photoresist compositions.Type: ApplicationFiled: September 7, 2006Publication date: March 22, 2007Applicant: Promerus LLCInventors: Larry Rhodes, Dennis Barnes, Andrew Bell, Brian Bennett, Chun Chang, John-Henry Lipian, Xiaoming Wu
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Publication number: 20060235174Abstract: Embodiments of the present invention relate generally to non-self imageable and imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.Type: ApplicationFiled: February 21, 2006Publication date: October 19, 2006Applicants: Promerus LLC, Tokyo Ohka Kogyo Co., Ltd.Inventors: Larry Rhodes, Chun Chang, Pramod Kandanarachchi, Lawrence Seger, Keita Ishiduka, Kotaro Endo, Tomoyuki Ando
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Publication number: 20060234164Abstract: Embodiments of the present invention relate generally to non-self imageable and imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.Type: ApplicationFiled: February 22, 2006Publication date: October 19, 2006Applicants: Promerus LLC, Tokyo Ohka Kogyo Co., Ltd.Inventors: Larry Rhodes, Chun Chang, Pramod Kandanarachchi, Lawrence Seger, Keita Ishiduka, Kotaro Endo, Tomoyuki Ando
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Publication number: 20060167197Abstract: A copolymer composition including a copolymer having repeat units of structural formula I: where X is selected from —CH2—, —CH2—CH2— and O; m is an integer from 0 to 5; and each occurrence of R1-R4 are independently selected from H; C1 to C25 linear, branched, and cyclic alkyl, aryl, aralkyl, alkaryl, alkenyl and alkynyl that can include one or more hetero atoms selected from O, N, and Si; a group that contains an epoxy functionality; —(CH2)nC(O)OR5; —(CH2)nC(O)OR; —(CH2)nOR6; —(CH2)nOC(O)R6; —(CH2)nC(O)R6; —(CH2)nOC(O)OR6; and any combination of two of R1, R2, R3, and R4 linked together by a linking group. A portion of the repeat units having structural formula I contain at least one epoxy functional pendant group. The copolymer composition can be included with a material that photonically forms a catalyst in a photodefinable dielectric composition, which can be used to form a photodefinable layer on a substrate.Type: ApplicationFiled: January 3, 2006Publication date: July 27, 2006Applicant: Sumitomo Bakelite Company, Ltd.Inventors: Edmund Elce, Takashi Hirano, Jeffrey Krotine, Larry Rhodes, Brian Goodall, SaiKumar Jayaraman, W. McDougall, Shenliang Sun