Patents by Inventor Laurent Duraffour

Laurent Duraffour has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Resonant inertial microsensor with variable thickness produced by surface engineering
    Patent number: 8783107
    Abstract: The invention relates to a surface-type MEMS resonant sensor, comprising a resonator (4) with excitation in a plane, which sensor comprises: a first, so-called thick area (2), having a first thickness (E1), forming a seismic mass; and a second, thin area (4), having a second thickness (E2), lower than the first, for detection.
    Type: Grant
    Filed: March 15, 2007
    Date of Patent: July 22, 2014
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Philippe Robert, Laurent Duraffour
  • Resonant inertial microsensor with variable thickness produced by surface engineering
    Publication number: 20070222011
    Abstract: The invention relates to a surface-type MEMS resonant sensor, comprising a resonator (4) with excitation in a plane, which sensor comprises: a first, so-called thick area (2), having a first thickness (E1), forming a seismic mass, a second, thin area (4), having a second thickness (E2), lower than the first, for detection.
    Type: Application
    Filed: March 15, 2007
    Publication date: September 27, 2007
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE
    Inventors: Philippe Robert, Laurent Duraffour