Abstract: A corona discharge static neutralizing device includes a wire electrode retained in tension between spaced ends of a resilient support member that is positioned within a flowing air stream. Another electrode aligned with and spaced from the wire electrode promotes a flowing ion stream, when connected to receive an ionizing difference of potential, that flows in skew orientation relative to the flowing air stream. Multiple wire electrodes are supported in tension on a resilient support member along with another electrode disposed on the support member intermediate the wire electrodes and in substantially the same plane therewith.

Abstract: An enclosure for transporting semiconductor wafers includes a pair of sensors that are responsive to electrostatic fields mounted on conductive grounded plates in facing orientations on opposite sides of a position within the enclosure at which a semiconductor wafer is to be located. Electronic circuitry within the enclosure in communication with the sensors supplies monitoring signals to remote circuitry external to the enclosure that isolates sources of contaminants and provides remote balance and gain adjustments. Calibration of the balance and gain adjustments uses a grounded plate for zero balance reference, and uses a plate of insulating material that is charged to a known potential for referencing gain adjustments to produce related outputs.

Abstract: Apparatus and method and system for measuring and controlling electrostatic charge on objects such as semiconductor substrates include a cassette having an inner structure with supporting slots and electrically conductive regions, and having isolated conductive outer walls for supporting objects in the slots, and include a charge monitor connected to the conductive regions and the conductive walls for sensing charge applicable to one or more objects carrying static charge positioned within the cassette. Charge neutralization is controlled in response to sensed charge attaining a selected level.