Patents by Inventor Lawrence C. West
Lawrence C. West has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7529435Abstract: An optical signal distribution network including a semiconductor substrate including a waveguide formed therein to carry an optical signal; and a plurality of detectors within the waveguide and serially arranged along its length, each of the detectors being capable of detecting the optical signal passing through it and sufficiently transparent to the optical signal to enable the optical signal to reach and be detected by all of the plurality of detectors.Type: GrantFiled: May 28, 2004Date of Patent: May 5, 2009Assignee: Applied Materials, Inc.Inventors: Lawrence C. West, Dan Mayden
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Patent number: 7505647Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.Type: GrantFiled: June 29, 2007Date of Patent: March 17, 2009Assignee: Applied Amterials, Inc.Inventors: Andreas Goebel, Lawrence C. West, Gregory L. Wojcik
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Publication number: 20080124084Abstract: An optical assembly is formed with a silicon substrate having a first surface and a second surface confronting the first surface. A reflective coating is formed over the first surface. Multiple diffraction gratings are formed integrally within the second surface of the silicon substrate. An optical absorber is formed over the second surface between the diffraction gratings.Type: ApplicationFiled: June 29, 2007Publication date: May 29, 2008Applicant: Applied Materials, Inc.Inventors: Andreas Goebel, Lawrence C. West, Gregory L. Wojcik
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Patent number: 7298941Abstract: An optoelectronic circuit including: an IC chip made up of a substrate in which an optical waveguide and a mirror have been fabricated, the substrate having a first lens formed thereon, wherein the mirror is aligned with the optical waveguide and the first lens is aligned with the mirror to form an optical path connecting the first lens, the mirror, and the optical waveguide; and an optical coupler including a second lens, the optical coupler affixed to the substrate and positioned to align the second lens with the first lens so as to couple an optical signal into or out of the optical waveguide within the IC chip.Type: GrantFiled: February 14, 2006Date of Patent: November 20, 2007Assignee: Applied Materials, Inc.Inventors: Edward L. Palen, Gregory L. Wojcik, Lawrence C. West
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Patent number: 7205624Abstract: A method of fabricating a detector, the method including forming an island of detector core material on a substrate, the island having a horizontally oriented top end, a vertically oriented first sidewall, and a vertically oriented second sidewall that is opposite said first sidewall; implanting a first dopant into the first sidewall to form a first conductive region that has a top end that is part of the top end of the island; implanting a second dopant into the second sidewall to form a second conductive region that has a top end that is part of the top end of the island; fabricating a first electrical connection to the top end of the first conductive region; and fabricating a second electrical connection to the top end of the second conductive region.Type: GrantFiled: October 6, 2004Date of Patent: April 17, 2007Assignee: Applied Materials, Inc.Inventors: Francisco A. Leon, Lawrence C. West
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Patent number: 7170142Abstract: A planar integrated circuit includes a semiconductor substrate having a substrate surface and a trench in the substrate, a waveguide medium in the trench having a top surface and a light propagation axis, the trench having a sufficient depth for the waveguide medium to be at or below said substrate surface, and at least one Schottky barrier electrode formed on the top surface of said waveguide medium and defining a Schottky barrier detector consisting of the electrode and the portion of the waveguide medium underlying the Schottky barrier electrode, at least the underlying portion of the waveguide medium being a semiconductor and defining an electrode-semiconductor interface parallel to the light propagation axis so that light of a predetermined wavelength from said waveguide medium propagates along the interface as a plasmon-polariton wave.Type: GrantFiled: May 26, 2004Date of Patent: January 30, 2007Assignee: Applied Materials, Inc.Inventors: Gregory L. Wojcik, Lawrence C. West, Thomas P. Pearsall
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Patent number: 7151881Abstract: An optical circuit including a semiconductor substrate; an optical waveguide formed in or on the substrate; and an optical detector formed in or on the semiconductor substrate, wherein the optical detector is aligned with the optical waveguide so as to receive an optical signal from the optical waveguide during operation, and wherein the optical detector has: a first electrode; a second electrode; and an intermediate layer between the first and second electrodes, the intermediate layer being made of a semiconductor material characterized by a conduction band, a valence band, and deep level energy states introduced between the conduction and valence bands.Type: GrantFiled: May 28, 2004Date of Patent: December 19, 2006Assignee: Applied Materials, Inc.Inventors: Lawrence C. West, Thomas P. Pearsall, Francisco A. Leon, Stephen Moffatt
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Patent number: 7110629Abstract: An article of manufacture comprising an optical-ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.Type: GrantFiled: July 21, 2003Date of Patent: September 19, 2006Assignee: Applied Materials, Inc.Inventors: Claes Bjorkman, Lawrence C. West, Dan Maydan, Samuel Broydo
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Patent number: 7103079Abstract: A circuit for generating a clock or sampling signal, the circuit including: a semiconductor quantum dot laser element including a region of quantum dots, wherein the region of quantum dots is characterized by an emission distribution having a half-width of at least about 10 meV; and drive circuitry connected to the quantum dot laser element for operating the quantum dot laser element as a mode-locked laser that outputs a periodic, uniformly spaced sequence of pulses, wherein the clock or sampling signal is derived from the sequence of pulses.Type: GrantFiled: June 28, 2004Date of Patent: September 5, 2006Assignee: Applied Materials, Inc.Inventors: John G. McInerney, Gregory L. Wojcik, Lawrence C. West
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Patent number: 7075165Abstract: A method of fabricating a detector that involves: forming a trench in a substrate, the substrate having an upper surface; forming a first doped semiconductor layer on the substrate and in the trench; forming a second semiconductor layer on the first doped semiconductor layer and extending into the trench, the second semiconductor layer having a conductivity that is less than the conductivity of the first doped semiconductor layer; forming a third doped semiconductor layer on the second semiconductor layer and extending into the trench; removing portions of the first, second and third layers that are above a plane defined by the surface of the substrate to produce an upper, substantially planar surface and expose an upper end of the first doped semiconductor layer in the trench; forming a first electrical contact to the first semiconductor doped layer; and forming a second electrical contact to the third semiconductor doped layer.Type: GrantFiled: May 28, 2004Date of Patent: July 11, 2006Assignee: Applied Material, Inc.Inventors: Francisco A. Leon, Lawrence C. West, Yuichi Wada, Gregory L. Wojcik, Stephen Moffatt
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Patent number: 7072534Abstract: An article of manufacture comprising an optical ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.Type: GrantFiled: October 25, 2002Date of Patent: July 4, 2006Assignee: Applied Materials, Inc.Inventors: Claes Björkman, Lawrence C. West, Dan Maydan, Samuel Broydo
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Patent number: 7043106Abstract: An optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, the front side having a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques. The optical ready substrate includes an optical signal distribution circuit fabricated on the front side of the substrate in a first layer region beneath the top surface of the substrate. The optical signal distribution circuit is made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.Type: GrantFiled: October 25, 2002Date of Patent: May 9, 2006Assignee: Applied Materials, Inc.Inventors: Lawrence C. West, Claes Björkman, Dan Maydan, Samuel Broydo
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Patent number: 7001788Abstract: A method of fabricating a waveguide mirror that involves etching a trench in a silicon substrate; depositing a film (e.g. silicon dioxide) over the surface of the silicon substrate and into the trench; ion etching the film to remove at least some of the deposited silicon dioxide and to leave a facet of film in inside corners of the trench; depositing a layer of SiGe over the substrate to fill up the trench; and planarizing the deposited SiGe to remove the SiGe from above the level of the trench.Type: GrantFiled: May 28, 2004Date of Patent: February 21, 2006Assignee: Applied Materials, Inc.Inventors: Francisco A. Leon, Lawrence C. West, Gregory L. Wojcik, Yuichi Wada
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Publication number: 20040114853Abstract: An article of manufacture comprising an optical-ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.Type: ApplicationFiled: July 21, 2003Publication date: June 17, 2004Applicant: APPLIED MATERIALS, INC.Inventors: Claes Bjorkman, Lawrence C. West, Dan Maydan, Samuel Broydo
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Publication number: 20040013338Abstract: An article of manufacture comprising an optical ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.Type: ApplicationFiled: October 25, 2002Publication date: January 22, 2004Applicant: Applied Materials, Inc.Inventors: Claes Bjorkman, Lawrence C. West, Dan Maydan, Samuel Broydo
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Publication number: 20040012041Abstract: An optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, the front side having a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques. The optical ready substrate includes an optical signal distribution circuit fabricated on the front side of the substrate in a first layer region beneath the top surface of the substrate. The optical signal distribution circuit is made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.Type: ApplicationFiled: October 25, 2002Publication date: January 22, 2004Applicant: Applied Materials, Inc.Inventors: Lawrence C. West, Claes Bjorkman, Dan Maydan, Samuel Broydo
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Patent number: 6311003Abstract: An optical electronic integrated circuit (OEIC) having optical waveguides as device interconnects. An optical waveguide is formed by depositing, in an oxygen-free atmosphere, a film of semiconductor material on a semiconductor substrate at a temperature that substantially diminishes the porosity of the film and the diffusion of material from the substrate into the film. The semiconductor film, which has an index of refraction greater than that of the substrate, is etched to form the optical waveguide on the substrate. The substrate also supports a plurality of active optical devices between which the optical waveguide extends. The substrate is preferably formed from gallium-arsenide and the waveguide from germanium. The active devices may also include these materials as well as aluminum-gallium-arsenide.Type: GrantFiled: February 24, 1999Date of Patent: October 30, 2001Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Madan Dubey, Kenneth A. Jones, Weiyu Han, Lawrence C. West
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Patent number: 6051445Abstract: An optical electronic integrated (circuit (OEIC) having optical waveguides s device interconnects. An optical waveguide is formed by depositing, in an oxygen-free atmosphere, a film of semiconductor material on a semiconductor substrate at a temperature that substantially diminishes the porosity of the film and the diffusion of material from the substrate into the film. The semiconductor film, which has an index of refraction greater than that of the substrate, is etched to form the optical waveguide on the substrate. The substrate also supports a plurality of active optical devices between which the optical waveguide extends. The substrate is preferably formed from gallium-arsenide and the waveguide from germanium. The active devices may also include these materials as well as aluminum-gallium-arsenide. When using these materials, the germanium film is deposited in an oxygen-free environment at about 100 degrees centigrade.Type: GrantFiled: February 24, 1999Date of Patent: April 18, 2000Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Madan Dubey, Kenneth A. Jones, Weiyu Han, Lawrence C. West
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Patent number: 5917967Abstract: An optical electronic integrated circuit (OEIC) having optical waveguides as device interconnects. An optical waveguide is formed by depositing, in an oxygen-free atmosphere, a film of semiconductor material on a semiconductor substrate at a temperature that substantially diminishes the porosity of the film and the diffusion of material from the substrate into the film. The semiconductor film, which has an index of refraction greater than that of the substrate, is etched to form the optical waveguide on the substrate. The substrate also supports a to plurality of active optical devices between which the optical waveguide extends. The substrate is preferably formed from gallium-arsenide and the waveguide from germanium. The active devices may also include these materials as well as aluminum-gallium-arsenide. When using these materials, the germanium film is deposited in an oxygen-free environment at about 100 degrees centigrade.Type: GrantFiled: May 21, 1997Date of Patent: June 29, 1999Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Madan Dubey, Kenneth A. Jones, Weiyu Han, Lawrence C. West
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Patent number: 5386126Abstract: A solid state, electronic, optical transition device includes a multiple-layer structure of semiconductor material which supports substantially ballistic electron/hole transport at energies above/below the conduction/valance band edge. The multiple layer structure of semiconductor material includes a Fabry-Perot filter element for admitting electrons/holes at a first quasibound energy level above/below the conduction/valance band edge, and for depleting electrons/holes at a second quasibound energy level which is lower/higher than the first energy level. Such an arrangement allows common semiconductor material to be used to produce emitters and detectors and other devices which can operate at any of selected frequencies over a wide range of frequencies.Type: GrantFiled: January 29, 1993Date of Patent: January 31, 1995Inventors: Gregory H. Henderson, Lawrence C. West, Thomas K. Gaylord, Charles W. Roberts, Elias N. Glytsis, Moses T. Asom