Patents by Inventor Lawrence D. Seger

Lawrence D. Seger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Norbornene-type polymers, compositions thereof and lithographic processes using such compositions
    Patent number: 8329838
    Abstract: Embodiments of the present invention relate generally to non-self imagable and imagable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: December 11, 2012
    Assignee: Promerus LLC
    Inventors: Larry F. Rhodes, Chun Chang, Pramod Kandanarachchi, Lawrence D. Seger, Keita Ishiduka, Kotaro Endo, Tomoyuki Ando
  • Norbornene-Type Polymers, Compositions Thereof And Lithographic Processes Using Such Compositions
    Publication number: 20110065878
    Abstract: Embodiments of the present invention relate generally to non-self imagable and imagable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.
    Type: Application
    Filed: September 17, 2010
    Publication date: March 17, 2011
    Applicants: PROMERUS LLC, TOKYO OHKA KOGYO CO., LTD.
    Inventors: Larry F. Rhodes, Chun Chang, Pramod Kandanarachchi, Lawrence D. Seger, Keita Ishiduka, Kotaro Endo, Tomoyuki Ando
  • Norbornene-type polymers, compositions thereof and lithographic process using such compositions
    Patent number: 7799883
    Abstract: Embodiments of the present invention relate generally to non-self imageable and imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.
    Type: Grant
    Filed: February 22, 2006
    Date of Patent: September 21, 2010
    Assignee: Promerus LLC
    Inventors: Larry F. Rhodes, Chun Chang, Pramod Kandanarachchi, Lawrence D. Seger, Keita Ishiduka, Kotaro Endo, Tomoyuki Ando