Patents by Inventor Le-Yen Lu

Le-Yen Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of removing carbon contamination on semiconductor substrate
    Patent number: 6066572
    Abstract: A method of removing carbon contamination. On a semiconductor substrate having carbon contamination thereon, a sacrificial oxide layer is formed. During the formation of the sacrificial oxide layer, an agent is introduced to help and improve the growth of the sacrificial oxide layer, and to trap the carbon contamination. The sacrificial oxide layer is then removed, and the carbon contamination is removed with the sacrificial oxide layer.
    Type: Grant
    Filed: February 1, 1999
    Date of Patent: May 23, 2000
    Assignee: United Semiconductor Corp.
    Inventors: Le-Yen Lu, Yau-Kae Sheu