Patents by Inventor Lee Fung Song

Lee Fung Song has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8418111
    Abstract: A method and apparatus for achieving multiple patterning compliant technology design layouts is provided. An exemplary method includes providing a routing grid having routing tracks; designating each of the routing tracks one of at least two colors; applying a pattern layout having a plurality of features to the routing grid, wherein each of the plurality of features corresponds with at least one routing track; and applying a feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout. If the pattern layout is not a multiple patterning compliant layout, the pattern layout may be modified until a multiple patterning compliant layout is achieved.
    Type: Grant
    Filed: November 24, 2010
    Date of Patent: April 9, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Huang-Yu Chen, Fang-Yu Fan, Yuan-Te Hou, Lee-Chung Lu, Ru-Gun Liu, Ken-Hsien Hsieh, Lee Fung Song, Wen-Chun Huang, Li-Chun Tien
  • Publication number: 20120131528
    Abstract: A method and apparatus for achieving multiple patterning compliant technology design layouts is provided. An exemplary method includes providing a routing grid having routing tracks; designating each of the routing tracks one of at least two colors; applying a pattern layout having a plurality of features to the routing grid, wherein each of the plurality of features corresponds with at least one routing track; and applying a feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout. If the pattern layout is not a multiple patterning compliant layout, the pattern layout may be modified until a multiple patterning compliant layout is achieved.
    Type: Application
    Filed: November 24, 2010
    Publication date: May 24, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Huang-Yu Chen, Fang-Yu Fan, Yuan-Te Hou, Lee-Chung Lu, Ru-Gun Liu, Ken-Hsien Hsieh, Lee Fung Song, Wen-Chun Huang, Li-Chun Tien