Patents by Inventor Lee M. Lowenstein

Lee M. Lowenstein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing apparatus and method
    Patent number: 4910043
    Abstract: A processing apparatus and method utilizing a single process chamber for deposition of silicon nitride with a silicon source, a remote plasma including a nitrogen source, additional ultraviolet energy coupled into the process chamber to provide additional molecular excitation of the silicon source.
    Type: Grant
    Filed: July 16, 1987
    Date of Patent: March 20, 1990
    Assignee: Texas Instruments Incorporated
    Inventors: Dean W. Freeman, James B. Burris, Cecil J. Davis, Lee M. Lowenstein