Patents by Inventor Lei Zhen Ce

Lei Zhen Ce has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating a titanium nitride sensing membrane on an EGFET
    Patent number: 6974716
    Abstract: A method for fabricating a titanium nitride (TiN) sensing membrane on an extended gate field effect transistor (EGFET). The method comprises the steps of depositing a layer of aluminum on a gate terminal of the EGFET using thermal evaporation and forming the TiN sensing membrane on an exposed part of the layer of aluminum in the sensitive window as an ion sensitive sensor (pH sensor) using a radio frequency (RF) sputtering process. Because TiN is suitable for use in a standard CMOS process, all the elements in the sensing device can be mass produced and offer the benefits of low cost, high yield, and high performance.
    Type: Grant
    Filed: March 17, 2004
    Date of Patent: December 13, 2005
    Assignee: Chung Yuan Christian University
    Inventors: Stephen S. K. Hsiung, Jung-Chuan Chou, Tai-Ping Sun, Wen-Yaw Chung, Yuan-Lung Chin, Lei Zhen Ce
  • Method for fabricating a titanium nitride sensing membrane on an EGFET
    Publication number: 20040185591
    Abstract: A method for fabricating a titanium nitride (TiN) sensing membrane on an extended gate field effect transistor (EGFET). The method comprises the steps of depositing a layer of aluminum on a gate terminal of the EGFET using thermal evaporation and forming the TiN sensing membrane on an exposed part of the layer of aluminum in the sensitive window as an ion sensitive sensor (pH sensor) using a radio frequency (RF) sputtering process. Because TiN is suitable for use in a standard CMOS process, all the elements in the sensing device can be mass produced and offer the benefits of low cost, high yield, and high performance.
    Type: Application
    Filed: March 17, 2004
    Publication date: September 23, 2004
    Inventors: Stephen S.K. Hsiung, Jung-Chuan Chou, Tai-Ping Sun, Wen-Yaw Chung, Yuan-Lung Chin, Lei Zhen Ce