Patents by Inventor Leif Eric Delaurentis

Leif Eric Delaurentis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coil and coil support for generating a plasma
    Publication number: 20040118521
    Abstract: A coil has an integral fastener portion to facilitate fastening the coil to a shield wall to reduce generation of particulates.
    Type: Application
    Filed: December 10, 2003
    Publication date: June 24, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Ian A. Pancham, Michael Rosenstein, Leif Eric DeLaurentis, Allen K. Lau, Praburam Gopalraja, James Van Gogh
  • Sputter magnetron having two rotation diameters
    Patent number: 6228236
    Abstract: A magnetron for use in a DC magnetron sputtering reactor that can rotate at a smaller diameter during a deposition phase and at a larger diameter during a cleaning phase, whereby sputter material redeposited outside of the deposition sputtering track is removed during the cleaning phase. An embodiment for a two-diameter magnetron includes a swing arm fixed on one end to the magnetron rotation motor shaft and on the other end to a pivot shaft, pivotably coupled to the magnetron. When the magnetron is rotated in different directions, hydrodynamic forces between the magnetron and the chilling water bath cause magnetron to pivot about the pivot shaft. Two mechanical detents fix the limits of the pivoting and hence establish the two diameters of rotation.
    Type: Grant
    Filed: October 22, 1999
    Date of Patent: May 8, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Michael Rosenstein, Jianming Fu, Leif Eric Delaurentis, James van Gogh, Alan Liu