Patents by Inventor Leihong Pei

Leihong Pei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation method and ion implanter for performing the same
    Patent number: 11482401
    Abstract: The present disclosure provides an ion implantation method and an ion implanter for realizing the ion implantation method. The above-mentioned ion implantation method comprises: providing a spot-shaped ion beam current implanted into the wafer; controlling the wafer to move back and forth in a first direction; controlling the spot-shaped ion beam current to scan back and forth in a second direction perpendicular to the first direction; and adjusting the scanning width of the spot-shaped ion beam current in the second direction according to the width of the portion of the wafer currently scanned by the spot-shaped ion beam current in the second direction.
    Type: Grant
    Filed: May 13, 2020
    Date of Patent: October 25, 2022
    Assignee: Shanghai Huali Integrated Circuit Mfg. Co. Ltd
    Inventors: Chaorong Lai, Leihong Pei
  • ION IMPLANTATION METHOD AND ION IMPLANTER FOR PERFORMING THE SAME
    Publication number: 20200388465
    Abstract: The present disclosure provides an ion implantation method and an ion implanter for realizing the ion implantation method. The above-mentioned ion implantation method comprises: providing a spot-shaped ion beam current implanted into the wafer; controlling the wafer to move back and forth in a first direction; controlling the spot-shaped ion beam current to scan back and forth in a second direction perpendicular to the first direction; and adjusting the scanning width of the spot-shaped ion beam current in the second direction according to the width of the portion of the wafer currently scanned by the spot-shaped ion beam current in the second direction.
    Type: Application
    Filed: May 13, 2020
    Publication date: December 10, 2020
    Inventors: Chaorong Lai, Leihong Pei