Patents by Inventor Leo V. Klos, Jr.

Leo V. Klos, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Indirectly heated cathode ion source
    Patent number: 7138768
    Abstract: An indirectly heated cathode ion source includes an arc chamber housing that defines an arc chamber, an indirectly heated cathode and a filament for heating the cathode. The cathode may include an emitting portion having a front surface, a rear surface and a periphery, a support rod attached to the rear surface of the emitting portion, and a skirt extending from the periphery of the emitting portion. A cathode assembly may include the cathode, a filament and a clamp assembly for mounting the cathode and the filament in a fixed spatial relationship and for conducting electrical energy to the cathode and the filament. The filament is positioned in a cavity defined by the emitting portion and the skirt of the cathode. The ion source may include a shield for inhibiting escape of electrons and plasma from a region outside the arc chamber in proximity to the filament and the cathode.
    Type: Grant
    Filed: May 23, 2002
    Date of Patent: November 21, 2006
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Peter E. Maciejowski, Joseph C. Olson, Shengwu Chang, Bjorn O. Pedersen, Leo V. Klos, Jr., Daniel Distaso, Curt D. Bergeron