Abstract: Systems, apparatuses, and methods are provided for correcting the detected positions of alignment marks disposed on a substrate and aligning the substrate using the corrected data to ensure accurate exposure of one or more patterns on the substrate. An example method can include receiving measurement data indicative of an interference between light diffracted from a plurality of alignment marks disposed on a substrate or reflected from the substrate. The example method can further include determining substrate deformation data based on the measurement data. The example method can further include determining alignment mark deformation data based on the measurement data. The alignment mark deformation data can include alignment mark deformation spectral pattern data, alignment mark deformation amplitude data, and alignment mark deformation offset data.

Abstract: A method including illuminating a product test substrate with radiation from a component, wherein the product test substrate does not have a device pattern etched therein and yields a non-zero sensitivity when illuminated, the non-zero sensitivity representing a change in an optical response characteristic of the product test substrate with respect to a change in a characteristic of the radiation; measuring at least a part of the radiation redirected by the product test substrate to determine a parameter value; and taking an action with respect to the component based on the parameter value.

Abstract: A method including illuminating a product test substrate with radiation from a component, wherein the product test substrate does not have a device pattern etched therein and yields a non-zero sensitivity when illuminated, the non-zero sensitivity representing a change in an optical response characteristic of the product test substrate with respect to a change in a characteristic of the radiation; measuring at least a part of the radiation redirected by the product test substrate to determine a parameter value; and taking an action with respect to the component based on the parameter value.

Abstract: Devices are disclosed for obtaining data of a sample, particularly data capable of being processed to produce an image of a region of the sample. An exemplary device includes a light-beam source, an acoustic-wave source, an optical element, and an acoustic detector. The optical element is transmissive to a light beam produced by the light-beam source and reflective to acoustic waves produced by the acoustic-wave source. The optical element is situated to direct the transmitted light beam and reflected acoustic wave simultaneously along an optical axis to be incident at a situs in or on a sample to cause the sample to produce acoustic echoes from the incident acoustic waves while also producing photoacoustic waves from the incident light beam photoacoustically interacting with the situs. The acoustic detector is placed to receive and detect the acoustic echoes and the photoacoustic waves from the situs. The acoustic detector can comprise one or more hydrophones exploiting the acousto-electric effect.

Abstract: Devices are disclosed for obtaining data of a sample, particularly data capable of being processed to produce an image of a region of the sample. An exemplary device includes a light-beam source, an acoustic-wave source, an optical element, and an acoustic detector. The optical element is transmissive to a light beam produced by the light-beam source and reflective to acoustic waves produced by the acoustic-wave source. The optical element is situated to direct the transmitted light beam and reflected acoustic wave simultaneously along an optical axis to be incident at a situs in or on a sample to cause the sample to produce acoustic echoes from the incident acoustic waves while also producing photoacoustic waves from the incident light beam photoacoustically interacting with the situs. The acoustic detector is placed to receive and detect the acoustic echoes and the photoacoustic waves from the situs. The acoustic detector can comprise one or more hydrophones exploiting the acousto-electric effect.

Abstract: Devices are disclosed for obtaining data of a sample, particularly data capable of being processed to produce an image of a region of the sample. An exemplary device includes a light-beam source, an acoustic-wave source, an optical element, and an acoustic detector. The optical element is transmissive to a light beam produced by the light-beam source and reflective to acoustic waves produced by the acoustic-wave source. The optical element is situated to direct the transmitted light beam and reflected acoustic wave simultaneously along an optical axis to be incident at a situs in or on a sample to cause the sample to produce acoustic echoes from the incident acoustic waves while also producing photoacoustic waves from the incident light beam photoacoustically interacting with the situs. The acoustic detector is placed to receive and detect the acoustic echoes and the photoacoustic waves from the situs. The acoustic detector can comprise one or more hydrophones exploiting the acousto-electric effect.

Abstract: Devices are disclosed for obtaining data of a sample, particularly data capable of being processed to produce an image of a region of the sample. An exemplary device includes a light-beam source, an acoustic-wave source, an optical element, and an acoustic detector. The optical element is transmissive to a light beam produced by the light-beam source and reflective to acoustic waves produced by the acoustic-wave source. The optical element is situated to direct the transmitted light beam and reflected acoustic wave simultaneously along an optical axis to be incident at a situs in or on a sample to cause the sample to produce acoustic echoes from the incident acoustic waves while also producing photoacoustic waves from the incident light beam photoacoustically interacting with the situs. The acoustic detector is placed to receive and detect the acoustic echoes and the photoacoustic waves from the situs. The acoustic detector can comprise one or more hydrophones exploiting the acousto-electric effect.