Patents by Inventor Leonid E. Reyzelman

Leonid E. Reyzelman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for VHF plasma processing with load mismatch reliability and stability
    Patent number: 6703080
    Abstract: A radio frequency (RF) generator apparatus for a plasma processing system that is resistant to nonlinear load mismatch conditions is provided. The apparatus includes an RF oscillator configured to generate an RF signal, an RF amplifier responsive to the RF signal to produce a VHF RF signal having sufficient power to drive a plasma chamber load, and a VHF-band circulator coupled to the amplifier and configured to isolate nonlinearities of the plasma chamber load from the amplifier.
    Type: Grant
    Filed: May 20, 2002
    Date of Patent: March 9, 2004
    Assignee: ENI Technology, Inc.
    Inventors: Leonid E. Reyzelman, John E. Sortor
  • Method and apparatus for VHF plasma processing with load mismatch reliability and stability
    Publication number: 20030215373
    Abstract: A radio frequency (RF) generator apparatus for a plasma processing system that is resistant to nonlinear load mismatch conditions is provided. The apparatus includes an RF oscillator configured to generate an RF signal, an RF amplifier responsive to the RF signal to produce a VHF RF signal having sufficient power to drive a plasma chamber load, and a VHF-band circulatorcoupled to the amplifier and configured to isolate nonlinearities of the plasma chamber load from the amplifier.
    Type: Application
    Filed: May 20, 2002
    Publication date: November 20, 2003
    Inventors: Leonid E. Reyzelman, John E. Sortor