Abstract: The fabrication of a first waveguide made of stoichiometric silicon nitride, of a second waveguide made of crystalline semiconductor material and of at least one active component optically coupled to the first waveguide via the second waveguide. The method includes: a) the formation of an aperture which passes through an encapsulation layer of the first waveguide and emerges in or on a substrate made of monocrystalline silicon, then b) the deposition by epitaxial growth of a crystalline seeding material inside the aperture until this crystalline seeding material forms a crystalline seed on a top face of the encapsulation layer, then c) a lateral epitaxy, of a crystalline semiconductor material from the crystalline seed formed to form a layer made of crystalline semiconductor material wherein the second waveguide is then produced.

Abstract: The invention is an electromechanical resonator, comprising a fixed portion and an oscillator oscillating at a resonant frequency and comprising a fluidic channel. The channel defines a fluidic circuit, can receive a fluid, and can be deformed at the resonant frequency. The resonator includes a waveguide, defining a photonic circuit, guiding a light wave between an input and an output of the waveguide and being able to be deformed at the resonant frequency. The waveguide input can be connected to a light source and the waveguide output can be connected to a photodetector able to form a signal representative of the light wave propagated by the waveguide towards the photodetector, the light wave being modulated at a frequency dependent on the resonant frequency. A variation in a mass of the fluid, inducing a variation in the resonant frequency, may be detected via the signal formed by the photodetector.

Abstract: The invention is an electromechanical resonator, comprising a fixed portion (10) and an oscillator (20, 60), the oscillator being able to oscillate at a resonant frequency (f), the oscillator comprising: a fluidic channel (25), defining a fluidic circuit, produced in the oscillator (20, 60), and intended to receive a fluid (4), the fluidic channel being able to be deformed at the resonant frequency, under the effect of the oscillation of the oscillator; the resonator being characterized in that it also includes: a waveguide (26), defining a photonic circuit, produced in the oscillator (20, 60), and intended to guide a light wave (7) between an input (26in) and an output (26out) of the waveguide, the waveguide (26) being able to be deformed at the resonant frequency (f), under the effect of the oscillation of the oscillator; the input (26in) of the waveguide being able to be connected to a light source (6), the output of the waveguide being able to be connected to a photodetector (8), so that the photodet