Abstract: A method of applying a patterned thin-film onto a substrate comprising the steps of plasma treating the substrate. Applying a liquid coating material, comprising one or more compounds selected from the group of organopolysiloxane polymers, organopolysiloxane oligomers, siloxane resins and polysilanes, onto the substrate surface, by a soft lithographic printing technique, preferably microcontact printing to form a patterned film thereon. Where required any residual liquid coating material may be removed from the substrate surface. The process does not require the liquid coating material undergo a curing step such as is required in Decal Transfer Microlithography techniques. Any suitable form of plasma treatment may be used to activate the substrate prior to printing.