Abstract: Re-calibration of pre-recorded images during interventions uses an interventional system including an imaging device providing images of an object, a needle device, and a processing device. The needle device includes a sensor for providing data corresponding to tissue properties. The processing device is configured to perform an overlay registration of pre-recorded images and live images provided by the imaging device, utilizing the data from the sensor. Thus, the accuracy of an overlay of images is increased.

Abstract: A device (1) for imaging the interior of an optically turbid medium is provided. The device comprises a receptacle (3; 103) structured to accommodate an optically turbid medium for examination and an optically matching medium filling a space between an inner surface (6; 106) of the receptacle (3; 103) and the optically turbid medium. The device comprises at least one light source generating light to be coupled into the receptacle (3; 103) and at least one detector for detecting light emanating from the receptacle (3; 103). A coupling surface (10; 110) optically coupled to the inner surface (6; 106) of the receptacle and a coupling member (11; 111) optically coupled to the light source and the detector are provided.

Abstract: Disclosed is a method and a device for optical imaging of a turbid medium. This method comprises a reference measurement of reference intensities of light emanating from the turbid medium at a reference blood oxygen saturation (SaO2) in the turbid medium and a reference imaging step for reconstructing a reference image of the turbid medium from the measured reference intensities. Furthermore the method comprises a contrast measurement of the contrast intensity of the light emanating from the turbid medium at a contrast blood oxygen saturation (SaO2) level in the turbid medium and a contrast imaging step for reconstructing a contrast image of the turbid medium from the measured contrast intensities. A comparison is made between the contrast image to the reference image of the turbid medium.

Abstract: An optical element includes a surface including a tilted profile having height differences, thereby providing cavities and elevations having a predetermined maximum height difference, and a transmissive layer that covers the cavities and the elevations of the optical element. A first height of the transmissive layer in the cavities is substantially equal or larger than the predetermined maximum height difference and the transmissive layer has a second height on the elevations and the second height is about 10-500 nm. The transmissive layer is enabled to optically filter incident radiation, and the optical element is a grating.

Abstract: To overcome the disadvantages introduced by using UV sensors to detect the intensity of UV light in water purification apparatuses, a novel detection apparatus to “visualize” the quality of water in the form of visible light, instead of digitizing the intensity of UV light includes s a first detection window, coated with a first material for converting a received first ultraviolet light into a first visible light. The first ultraviolet light is emitted from an ultraviolet light source and traverses the liquid, and the detection apparatus further mixes the first visible light with second visible light to generate a third visible light. The different color of the third visible light can represent the different quality of the water.

Abstract: A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.

Abstract: An optical element includes a top layer which is transmissive for EUV radiation with wavelength in the range of 5-20 nm, and a structure of the top layer is a structure having an rms roughness value equal to or larger than ?/10 for spatial periods equal to or smaller than ?/2. The structure promotes transmission through the top layer to the optical element.

Abstract: A device and method of acquiring image data from a turbid medium using a diffuse optical tomography device including irradiating the turbid medium at a plurality of first spatial positions, collecting light emanating from the turbid medium at a plurality of second spatial positions, splitting the light collected from each second spatial position into at least two optical channels, measuring the intensity of the split light in each optical channel of the at least two optical channels using photo detectors, and reconstructing an image of the turbid medium from the measured intensities.

Abstract: An optical element includes a top layer which is transmissive for EUV radiation with wavelength ? in the range of 5-20 nm, and a structure of the top layer is a structure having an rms roughness value equal to or larger than ?/10 for spatial periods equal to or smaller than ?/2. The structure promotes transmission through the top layer to the optical element.

Abstract: To overcome the disadvantages introduced by using UV sensors to detect the intensity of UV light in water purification apparatuses, the present invention provides a novel detection apparatus to “visualize” the quality of water in the form of visible light, instead of digitizing the intensity of UV light. The detection apparatus comprises a first detection window, coated with a first material for converting a received first ultraviolet light into a first visible light, wherein the first ultraviolet light is emitted from an ultraviolet light source and traverses the liquid, and the apparatus further mixes the first visible light with a second visible light to generate a third visible light. The different color of the third visible light can represent the different quality of the water.

Abstract: A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam, a projection system configured to project the radiation beam onto a substrate, and a filter system for filtering debris particles out of the radiation beam. The filter system includes a plurality of foils for trapping the debris particles, a support for holding the plurality of foils, and a cooling system having a surface that is arranged to be cooled. The cooling system and the support are positioned with respect to each other such that a gap is formed between the surface of the cooling system and the support. The cooling system is further arranged to inject gas into the gap.

Abstract: A system for detecting at least one contamination species in an interior space of a lithographic apparatus, including: at least one monitoring surface configured to be in contact with the interior space, a thermal controller configured to control the temperature of the monitoring surface to at least one detection temperature, and at least one detector configured to detect condensation of the at least one contamination species onto the monitoring surface.

Abstract: This invention relates to an illumination apparatus. The illumination apparatus comprises a light guide plate and a light source configured to emit light into the light guide plate through a first surface, and the light guide plate comprises a concentrator configured to direct incident light in the light guide plate so as to radiate in a direction substantially parallel to a preset plane. The preset plane is perpendicular to any one of the top surface and bottom surface of the light guide plate, and intersects the first surface and a second surface of the light guide plate or intersects the first surface and one of the side surfaces at an angle that is substantially larger than the critical angle of a total reflection. In this way, unwanted light loss in the light guide plate is reduced, and the distribution of the light intensity or luminance along the light guide plate is improved, i.e., a substantially uniform distribution of the light intensity can be achieved.

Abstract: An optical element includes a surface including a tilted profile having height differences, thereby providing cavities and elevations having a predetermined maximum height difference, and a transmissive layer that covers the cavities and the elevations of the optical element. A first height of the transmissive layer in the cavities is substantially equal or larger than the predetermined maximum height difference and the transmissive layer has a second height on the elevations and the second height is about 10-500 nm. The transmissive layer is enabled to optically filter incident radiation, and the optical element is a grating.

Abstract: A method for removing contaminant particles, such as atoms, molecules, clusters, ions, and the like, produced by a radiation source during generation of short-wave radiation having a wavelength of up to approximately 20 nm, includes guiding a first gas between the radiation source and a particle trap arranged in a wall of a chamber. In order to protect an optical device and/or articles to be irradiated against contamination, the method introducing a second gas into the chamber and its pressure is adjusted such that it is at least as high as the pressure of the first gas.

Abstract: The present invention provides a method of monitoring performance of a discharge lamp. The discharge lamp includes electrodes and a discharge vessel filled with gas and equipped with a luminescent layer, wherein the gas is intended to emit a first ultraviolet light in a first spectral range when the gas is excited by an electric field produced by the electrodes, and at least part of the first ultraviolet light is intended to be changed into a second ultraviolet light in a second spectral range of longer wavelength than the first spectral range by the luminescent layer. The method comprises the steps of finding the value of a first intensity of the first ultraviolet light; finding the value of a second intensity of the second ultraviolet light; and determining the conversion efficiency of the luminescent layer for converting the first ultraviolet light into the second ultraviolet light on the basis of the ratio of the value of the second intensity to the value of the first intensity.

Abstract: A method for manufacturing and/or protecting an optical element, wherein the optical element has at least one surface comprising a profile having height differences, thereby providing cavities and elevations having a predetermined maximum height difference, includes providing a transmissive layer in the cavities and on the elevations of the optical elements, the transmissive layer having a first height in the cavities that is larger than the predetermined maximum height difference, and surfacing the transmissive layer after providing the transmissive layer such that the transmissive layer has a second height on the elevations that is substantially zero or larger, thereby providing a transmissive layer with a substantially planar surface.

Abstract: A lithographic apparatus comprising a support configured to support a patterning device; a substrate table configured to hold a substrate; a projection system configured to project a pattern imparted to a radiation beam by the patterning device onto a target portion of the substrate; and a first multi-layer mirror and a second multi-layer mirror, the first multi-layer mirror and the second multi-layer minor being arranged along a path of the radiation beam, the first multi-layer minor and the second multi-layer mirror each having a reflectivity of at least about 50% in extreme ultra violet wavelength range, and the first multi-layer mirror configured to reduce radiation having wavelengths in a first wavelength range and the second multi-layer minor configured to reduce radiation having wavelengths in a second wavelength range different from the first wavelength range, wherein the first wavelength range and the second wavelength range are outside extreme ultra violet wavelength range.

Abstract: Re-calibration of pre-recorded images during interventions is proposed, utilizing an interventional system comprising an imaging device providing images of an object, a needle device, and a processing device. The needle device comprises a sensor for providing data corresponding to tissue properties. The processing device is adapted to perform an overlay registration of pre-recorded images and live images provided by the imaging device, utilizing the data from the sensor. Thus, the accuracy of an overlay of images is increased.