Patents by Inventor Liam R. Heading

Liam R. Heading has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations
    Patent number: 5851293
    Abstract: A flow stabilization system for damping pressure variations in a process discharging an effluent gas stream, in which the process is pressure-sensitive and downstream pressure variations can adversely affect the upstream process, said system comprising a motive fluid driver constructed and arranged to receive the effluent gas stream from the process, and means for sensing a flow characteristic of the effluent gas stream and responsively adjusting the flow of the effluent gas stream to damp pressure fluctuations in the process.
    Type: Grant
    Filed: September 6, 1996
    Date of Patent: December 22, 1998
    Assignee: ATMI Ecosys Corporation
    Inventors: Scott Lane, Dinesh Shah, Ronald Colman, Liam R. Heading, Eric Simpson