Patents by Inventor Lifang Xu

Lifang Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240055350
    Abstract: An electronic device comprises a stack comprising an alternating sequence of conductive structures and insulative structures arranged in tiers, and at least one dielectric-filled slot extending vertically through the stack and extending in a first horizontal direction. The at least one dielectric-filled slot is defined between two internal sidewalls of the stack. The electronic device comprises additional dielectric-filled slots extending vertically through the stack and extending in a second horizontal direction transverse to the first horizontal direction, and isolation structures laterally interposed between the at least one dielectric-filled slot and the additional dielectric-filled slots. The isolation structures are laterally adjacent to the conductive structures of the stack, and at least some of the isolation structures are vertically adjacent to the insulative structures of the stack. Related systems and methods of forming the electronic devices are also disclosed.
    Type: Application
    Filed: August 12, 2022
    Publication date: February 15, 2024
    Inventors: Mark S. Swenson, Surendranath C. Eruvuru, Lifang Xu
  • Patent number: 11903211
    Abstract: A method of forming a microelectronic device comprises forming isolated nitride structures on steps of stair step structures comprising stacked tiers comprising alternating levels of a first insulative material and a second insulative material, forming a photoresist material over some of the stair step structures, and replacing the isolated nitride structures and the second insulative material with an electrically conductive material to respectively form conductive pad structures and electrically conductive lines. Related microelectronic devices and electronic devices are also disclosed.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: February 13, 2024
    Inventors: Lifang Xu, John D. Hopkins, Roger W. Lindsay, Shuangqiang Luo
  • Patent number: 11901287
    Abstract: Microelectronic devices include a stack structure having a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. At least one stadium, of stadiums within the stack structure, comprise staircase(s) having steps provided by a group of the conductive structures. Step contacts extend to the steps of the staircase(s) of the at least one of the stadiums. Each conductive structure of the group of conductive structures has more than one of the step contacts in contact therewith at at least one of the steps of the staircase(s). Additional microelectronic devices are also disclosed, as are methods of fabrication and electronic systems.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: February 13, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Lifang Xu
  • Publication number: 20240046989
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a lower stack comprising vertically-alternating different-composition lower first tiers and lower second tiers. The lower stack comprises lower channel-material strings extending through the lower first tiers and the lower second tiers. An upper stack is formed directly above the lower stack. The upper stack comprises vertically-alternating different-composition upper first tiers and upper second tiers. The upper stack comprises upper channel-material strings of select-gate transistors. Individual of the upper channel-material strings are directly electrically coupled to individual of the lower channel-material strings. The upper and lower first tiers are conductive at least in a finished-circuitry construction. The upper and lower second tiers are insulative and comprise insulative material.
    Type: Application
    Filed: August 5, 2022
    Publication date: February 8, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Jiewei Chen, Shuangqiang Luo, Lifang Xu
  • Patent number: 11894305
    Abstract: A microelectronic device includes a stack structure, a staircase structure, conductive pad structures, and conductive contact structures. The stack structure includes vertically alternating conductive structures and insulating structures arranged in tiers. Each of the tiers individually includes one of the conductive structures and one of the insulating structures. The staircase structure has steps made up of edges of at least some of the tiers of the stack structure. The conductive pad structures are on the steps of the staircase structure and include beta phase tungsten. The conductive contact structures are on the conductive pad structures. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Grant
    Filed: April 12, 2022
    Date of Patent: February 6, 2024
    Inventors: Jordan D. Greenlee, John D. Hopkins, Rita J. Klein, Everett A. McTeer, Lifang Xu, Daniel Billingsley, Collin Howder
  • Patent number: 11894269
    Abstract: Some embodiments include an integrated assembly having a stack of alternating first and second levels. The first levels contain conductive material and the second levels contain insulative material. At least some of the first and second levels are configured as steps. Each of the steps has one of the second levels over an associated one of the first levels. A layer is over the steps and is spaced from the stack by an intervening insulative region. Insulative material is over the layer. Conductive interconnects extend through the insulative material, through the layer, through the intervening insulative region and to the conductive material within the first levels of the steps. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: January 17, 2022
    Date of Patent: February 6, 2024
    Inventors: John D. Hopkins, Lifang Xu, Nancy M. Lomeli
  • Publication number: 20240029795
    Abstract: Memory circuitry comprising strings of memory cells comprises channel-material strings of memory cells extending through insulative tiers and conductive tiers in a memory-array region. The insulative and conductive tiers extend from the memory-array region into a stair-step region. A plurality of stair-step structures is in the stair-step region. The stair-step structures individually comprise two opposing flights of stairs. The stair-step structures comprise an SGD stair-step structure and non-SGD stair-step structures. At least one of the non-SGD stair-step structures has less total stairs than are in individual of multiple others of the non-SGD stair-step structures. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: July 19, 2022
    Publication date: January 25, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Anna Maria Conti, Lifang Xu, Harsh Narendrakumar Jain
  • Publication number: 20240029794
    Abstract: A method used in forming memory circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack extends from a memory-array region into a stair-step region. The first tiers are conductive and the second tiers are insulative at least in a finished-circuitry construction. A first layer of imageable resist is exposed to actinic radiation and developed to form a first opening there-through in the stair-step region. The developed first layer is used in a plurality of alternating etching and lateral-trimming steps that widens the first opening and forms two opposing flights of stairs in the stack in the stair-step region. A second layer of imageable resist is formed directly above the two opposing flights of stairs. The second layer is exposed to actinic radiation and developed to form a second opening there-through. The second opening exposes all of the stairs of one of the two opposing flights.
    Type: Application
    Filed: July 19, 2022
    Publication date: January 25, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Lifang Xu, Anna Maria Conti, Harsh Narendrakumar Jain, H. Montgomery Manning
  • Patent number: 11864387
    Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. The operative channel-material strings in the laterally-spaced memory blocks comprise part of a memory plane. An elevationally-extending wall is in the memory plane laterally-between immediately-laterally-adjacent of the memory blocks and that completely encircles an island that is laterally-between immediately-laterally-adjacent of the memory blocks in the memory plane. Other embodiments, including method are disclosed.
    Type: Grant
    Filed: December 16, 2022
    Date of Patent: January 2, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Indra V. Chary, Justin B. Dorhout, Jian Li, Haitao Liu, Paolo Tessariol
  • Patent number: 11856763
    Abstract: A method of forming a microelectronic device including a first stack structure comprising alternating levels of insulative structures and other insulative structures, forming strings of memory cells through the first stack structure, forming a second stack structure over the first stack structure, based at least partially on observed amount of pillar bending within the first stack structure, forming a first tailored reticle specific to the observed amount of pillar bending, utilizing the first tailored reticle to form openings extending through the second stack structure and over some of the strings of memory cells, wherein centers of the openings over the strings of memory cells are at least substantially aligned with the centers of uppermost surfaces of the strings of memory cells in a direction of the observed pillar bending, and forming upper pillars extending through the second stack structure and over some of the strings of memory cells.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: December 26, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Sidhartha Gupta, Kar Wui Thong, Harsh Narendrakumar Jain
  • Publication number: 20230397421
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another, the tiers including conductive materials that form part of respective control gates for memory cells of the apparatus; a staircase structure formed in the tiers, the conductive materials including respective portions that collectively form a part of the staircase structure, the staircase structure including a sidewall on a side of the staircase structure; a dielectric liner formed on the sidewall; recesses formed in respective tiers and adjacent the sidewall such that respective portions of the dielectric liner are located in the recesses; and a contact structure extending through a portion of the dielectric liner, wherein the portions of the dielectric liner are between the contract structure and the conductive materials.
    Type: Application
    Filed: July 28, 2022
    Publication date: December 7, 2023
    Inventors: Mallesh Rajashekharaiah, Lifang Xu, Nancy M. Lomeli
  • Publication number: 20230387353
    Abstract: Textured optoelectronic devices and associated methods of manufacture are disclosed herein. In several embodiments, a method of manufacturing a solid state optoelectronic device can include forming a conductive transparent texturing material on a substrate. The method can further include forming a transparent conductive material on the texturing material. Upon heating the device, the texturing material causes the conductive material to grow a plurality of protuberances. The protuberances can improve current spreading and light extraction from the device.
    Type: Application
    Filed: July 26, 2023
    Publication date: November 30, 2023
    Inventors: Lifang Xu, Scott D. Schellhammer, Shan Ming Mou, Michael J. Bernhardt
  • Publication number: 20230361053
    Abstract: Microelectronic devices include a stack structure of insulative structures vertically alternating with conductive structures and arranged in tiers forming opposing staircase structures. A polysilicon fill material substantially fills an opening (e.g., a high-aspect-ratio opening) between the opposing staircase structures. The polysilicon fill material may have non-compressive stress such that the stack structure may be partitioned into blocks without the blocks bending and without contacts—formed in at least one of the polysilicon fill material and the stack structure—deforming, misaligning, or forming electrical shorts with neighboring contacts.
    Type: Application
    Filed: July 21, 2023
    Publication date: November 9, 2023
    Inventors: Jivaan Kishore Jhothiraman, John M. Meldrim, Lifang Xu
  • Patent number: 11805653
    Abstract: A memory can have a stacked memory array that can have a plurality of levels of memory cells. Each respective level of memory cells can be commonly coupled to a respective access line. A plurality of drivers can be above the stacked memory array. Each respective driver can have a monocrystalline semiconductor with a conductive region coupled to a respective access line.
    Type: Grant
    Filed: January 8, 2021
    Date of Patent: October 31, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Haitao Liu, Kamal M. Karda, Gurtej S. Sandhu, Sanh D. Tang, Akira Goda, Lifang Xu
  • Publication number: 20230328975
    Abstract: Some embodiments include an integrated assembly having a first memory region, a second memory region, and an intermediate region between the memory regions. A stack extends across the memory regions and the intermediate region. The stack includes alternating conductive levels and insulative levels. Channel-material-pillars are arranged within the memory regions. Memory-block-regions extend longitudinally across the memory regions and the intermediate region. Staircase regions are within the intermediate region. Each of the staircase regions laterally overlaps two of the memory-block-regions. First panel regions extend longitudinally across at least portions of the staircase regions. Second panel regions extend longitudinally and provide lateral separation between adjacent memory-block-regions. The second panel regions are of laterally different dimensions than the first panel regions and/or are compositionally different than the first panel regions.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 12, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Shuangqiang Luo, Lifang Xu, Indra V. Chary
  • Patent number: 11785775
    Abstract: A method of forming a microelectronic device includes forming a microelectronic device structure. The microelectronic device structure includes a stack structure having an alternating sequence of conductive structures and insulative structures, an upper stadium structure, a lower stadium structure, and a crest region defined between a first stair step structure of the upper stadium structure and a second stair step structure of the lower stadium structure. The stack structure further includes pillar structures extending through the stack structure and dielectric structures interposed between neighboring pillar structures within the upper stadium structure. The method further includes forming a trench in the crest region of the stack structure between two dielectric structures of the dielectric structures on opposing sides of another dielectric structure and filling the trench with a dielectric material. The trench partially overlaps with the dielectric structures.
    Type: Grant
    Filed: January 20, 2021
    Date of Patent: October 10, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Shuangqiang Luo, Harsh Narendrakumar Jain, Nancy M. Lomeli, Christopher J. Larsen
  • Publication number: 20230317604
    Abstract: Microelectronic devices include a stack structure having a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A series of stadiums, within the stack structure, includes stadiums of differing numbers of staircase sets, such as a stadium having multiple parallel sets of staircases and an additional stadium having a single set of staircases. Each of the staircases comprises steps, at ends of the conductive structures, with a same multi-tier riser height. In methods of fabrication, a same initial stadium opening may be concurrently formed for each of the stadiums—regardless of whether the stadium is to include the single set or the multiple parallel sets of staircases—with the steps of the same multi-tier riser height. Electronic systems are also disclosed.
    Type: Application
    Filed: March 30, 2022
    Publication date: October 5, 2023
    Inventors: Lifang Xu, Harsh Narendrakumar Jain, Indra V. Chary, Umberto Maria Meotto, Paolo Tessariol
  • Publication number: 20230307350
    Abstract: A microelectronic device includes a stack structure having blocks separated by dielectric slot structures and each including a vertically alternating sequence of conductive structures and insulative structures arranged in tiers. At least one of the blocks includes an upper stadium structure, two crest regions, a lower stadium structure, and two bridge regions. The upper stadium structure extends from and between two of the dielectric slot structures, and includes staircase structures having steps including edges of some of the tiers. The two crest regions are horizontally offset from the upper stadium structure. The lower stadium structure is below the upper stadium structure, is interposed between the two crest regions, and includes additional staircase structures. The two bridge regions are interposed between the lower stadium structure and the two of the dielectric slot structures, and extend between the two crest regions. Related memory devices, electronic systems, and methods are also described.
    Type: Application
    Filed: March 22, 2022
    Publication date: September 28, 2023
    Inventors: Lifang Xu, Indra V. Chary, Richard J. Hill
  • Publication number: 20230301081
    Abstract: A microelectronic device comprises a stack structure comprising blocks separated from one another by dielectric slot structures. At least one of the blocks comprises two crest regions, a stadium structure interposed between the two crest regions in a first horizontal direction, and two bridge regions neighboring opposing sides of the stadium structure in a second horizontal direction. A filled trench vertically overlies and is within horizontal boundaries of the stadium structure of the at least one of the blocks. The filled trench comprises a dielectric liner material on the opposing staircase structures of the stadium structure and on inner sidewalls of the two bridge regions, and dielectric structures on and having a different material composition than the dielectric liner material. The dielectric structures are substantially confined within horizontal areas of the steps of the stadium structure. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
    Type: Application
    Filed: May 22, 2023
    Publication date: September 21, 2023
    Inventors: Christopher J. Larsen, Lifang Xu
  • Patent number: 11765902
    Abstract: A memory array comprising strings of memory cells comprises a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells are in the stack. The channel-material strings project upwardly from material of an uppermost of the tiers. A first insulator material is above the material of the uppermost tier directly against sides of channel material of the upwardly-projecting channel-material strings. The first insulator material comprises at least one of (a) and (b), where (a): silicon, nitrogen, and one or more of carbon, oxygen, boron, and phosphorus, and (b): silicon carbide. Second insulator material is above the first insulator material. The first and second insulator materials comprise different compositions relative one another. Conductive vias in the second insulator material are individually directly electrically coupled to individual of the channel-material strings. Other embodiments, including methods, are disclosed.
    Type: Grant
    Filed: October 1, 2021
    Date of Patent: September 19, 2023
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Lifang Xu