Patents by Inventor Lin-Jui CHEN

Lin-Jui CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV RADIATION GENERATION METHODS AND SYSTEMS
    Publication number: 20220386440
    Abstract: A method for generating EUV light includes providing a laser beam having a Gaussian distribution. This laser beam can be then modified from a Gaussian distribution to a ring-like distribution. The modified laser beam is provided through an aperture in a collector and interfaces with a moving droplet target, which generates an extreme ultraviolet (EUV) wavelength light. The generated EUV wavelength light is provided to the collector away from the aperture. In some embodiments, a mask element may also be used to modify the laser beam to a shape.
    Type: Application
    Filed: August 8, 2022
    Publication date: December 1, 2022
    Inventors: Chun-Lin Louis CHANG, Jen-Hao YEH, Tzung-Chi FU, Bo-Tsun LIU, Lin-Jui CHEN, Po-Chung CHENG