Patents by Inventor Linan Ji

Linan Ji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20090250431
    Abstract: A substrate processing method that processes a substrate on which a plurality of patterns adjacent to each other are formed, has: supplying a first processing liquid to a principal surface of the substrate that is dry and has the patterns formed thereon to make the first processing liquid adhere to the principal surface of the substrate; and supplying a second processing liquid having a higher surface tension than the first processing liquid to the principal surface of the substrate in the state where the first processing liquid adheres to the principal surface of the substrate to process the principal surface of the substrate with the second processing liquid.
    Type: Application
    Filed: March 16, 2009
    Publication date: October 8, 2009
    Inventors: Minako INUKAI, Yoshihiro OGAWA, Hiroshi TOMITA, Hiroyasu IIMORI, Yuji YAMADA, Yoshihiro UOZUMI, Linan JI, Kaori UMEZAWA, Hisadhi OKUCHI