Abstract: The present disclosure provides a sputtering reaction chamber and a process assembly of the sputtering reaction chamber. The process assembly includes a liner, and the liner includes an integrally formed body member and a cover member. The cover member may extend from a bottom of the body member to an inner side of the body member and may be configured to press an edge of a to-be-processed workpiece when a process is performed. A cooling channel may be arranged in the cover member and the body member and may be configured to cool the cover member and the body member by transferring coolant. The process assembly of the sputtering reaction chamber and the sputtering reaction chamber provided by the present disclosure can reduce heat radiation of the process assembly to the to-be-processed workpiece and released gases and impurities to effectively reduce a whisker defect and improve a product yield.

Abstract: The present disclosure provides a sputtering reaction chamber and a process assembly of the sputtering reaction chamber. The process assembly includes a shield, and the shield includes an integrally formed body member and a cover ring member, wherein the body member may be in a ring shape. The cover ring member may extend from a bottom of the body member to an inner side of the body member and may be configured to press an edge of a to-be-processed workpiece when a process is performed. A cooling channel may be arranged in the cover ring member and the body member and may be configured to cool the cover ring member and the body member by transferring coolant. The process assembly of the sputtering reaction chamber and the sputtering reaction chamber provided by the present disclosure can reduce heat radiation of the process assembly to the to-be-processed workpiece and released gases and impurities to effectively reduce a whisker defect and improve a product yield.

Abstract: A high-voltage electric pulse device for crushing pretreatment of ores includes an ore feeding bin, a pulse insulating barrel body, a supporting frame, a pulsation device, a product collector and a power supply. The pulse insulating barrel body and the pulsation device are assembled together, a pulsation insulating barrel body is connected with an actuating diaphragm, the actuating diaphragm is connected with an ore discharging outlet, a pulsation cone is arranged in the ore discharging outlet, the pulsation cone is hinged to a connecting rod, and the connecting rod is hinged to an eccentric wheel. Expanding and contracting devices are arranged on a cover plate, a copper bar of each expanding and contracting device is connected to a corresponding high-voltage ceramic capacitor through a high-voltage wire in parallel. A high-voltage negative pole is mounted on a screen cloth at the pulse insulating barrel body.

Abstract: A high-voltage electric pulse device for crushing pretreatment of ores includes an ore feeding bin, a pulse insulating barrel body, a supporting frame, a pulsation device, a product collector and a power supply. The pulse insulating barrel body and the pulsation device are assembled together, a pulsation insulating barrel body is connected with an actuating diaphragm, the actuating diaphragm is connected with an ore discharging outlet, a pulsation cone is arranged in the ore discharging outlet, the pulsation cone is hinged to a connecting rod, and the connecting rod is hinged to an eccentric wheel. Expanding and contracting devices are arranged on a cover plate, a copper bar of each expanding and contracting device is connected to a corresponding high-voltage ceramic capacitor through a high-voltage wire in parallel. A high-voltage negative pole is mounted on a screen cloth at the pulse insulating barrel body.