Patents by Inventor Lisa Michelle Mandrell

Lisa Michelle Mandrell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS OF GROWING METAL-CONTAINING FILMS
    Publication number: 20230295803
    Abstract: Methods of forming metal-containing films for electronic devices (e.g., logic devices and/or memory devices) and methods for reducing equivalent oxide thickness (EOT) penalty in electronic devices are disclosed. The methods comprise exposing a substrate surface to a metal precursor, such as titanium chloride (TiCl4), a reducing agent, such as a cyclic 1,4-diene, and a reactant, ammonia (NH3), either simultaneously, partially simultaneously or separately and sequentially to form the metal-containing film.
    Type: Application
    Filed: April 14, 2023
    Publication date: September 21, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Haoming Yan, Shih Chung Chen, Mandyam Sriram, EunKee Hong, Janardhan Devrajan, Lakmal C. Kalutarage, Yongjing Lin, Lisa Michelle Mandrell, Arkaprava Dan