Patents by Inventor Lisa R. Granick

Lisa R. Granick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabricating airbridge metal interconnects
    Patent number: 4857481
    Abstract: An improved method of fabricating airbridge metal interconnects uses two photoresist layers having different solubility characteristics. This allows for the removal of one resist without affecting the other. Thus, the underlying semiconductor structure is protected from subsequent etches of the ground plane metal. Consequently, a greater process latitude allows for obtaining higher device yields in fabricating high frequency semiconductor devices employing airbridge metal interconnects.
    Type: Grant
    Filed: March 14, 1989
    Date of Patent: August 15, 1989
    Assignee: Motorola, Inc.
    Inventors: Gordon Tam, Lisa R. Granick