Abstract: The present application provides a semiconductor device and the method of making the same. The method includes recessing a fin extending from a substrate, forming a base epitaxial feature on the recessed fin, forming a bar-like epitaxial feature on the base epitaxial feature, and forming a conformal epitaxial feature on the bar-like epitaxial feature. The forming of the bar-like epitaxial feature includes in-situ doping the bar-like epitaxial feature with an n-type dopant at a first doping concentration. The forming of the conformal epitaxial feature includes in-situ doping the conformal epitaxial feature with a second doping concentration greater than the first doping concentration.

Abstract: A servo rotary carrier includes a base, which includes a receiving space formed therein and has a top in which first and second openings that communicate with and between the receiving space and the outside are formed; a rotation unit, which includes a supporting section extending through the first opening of the base and a bearing coupled to the supporting section and having a top to which a first toothed wheel is mounted; a disk, which has a top to which clamping elements are mounted, the first toothed wheel being coupled to a bottom of the disk; and a power transmission unit, which includes a power source and a transmission device coupled to the power source and having a transmission spindle that extends vertically upward through the second opening and includes a second toothed wheel coupled thereto to mate the first toothed wheel.

Abstract: A servo rotary carrier includes a base, which includes a receiving space formed therein and has a top in which first and second openings that communicate with and between the receiving space and the outside are formed; a rotation unit, which includes a supporting section extending through the first opening of the base and a bearing coupled to the supporting section and having a top to which a first toothed wheel is mounted; a disk, which has a top to which clamping elements are mounted, the first toothed wheel being coupled to a bottom of the disk; and a power transmission unit, which includes a power source and a transmission device coupled to the power source and having a transmission spindle that extends vertically upward through the second opening and includes a second toothed wheel coupled thereto to mate the first toothed wheel.