Abstract: Method for preparing sputtering targets according to one embodiment, by reacting a mixture of alkoxides of metals such as titanium, lanthanum and zirconium, with a soluble lead compound such as lead acetate in an organic solvent in the presence of aqueous ammonium hydroxide, to form a sol-gel. The solvent is removed from the sol-gel to form a powder. The powder is mixed with a liquid medium, e.g. an aqueous medium containing an organosol, to form a slurry of the powder and the slurry is cast on a substrate such as a polyester tape and dried to form a tape of the sol-gel. The tape is cut into individual tapes and the tapes are stacked and laminated under heat and pressure into a monolithic unit, which is then filed at high temperature. The dense monolithic unit thus formed is mechanically machined to the desired shape, e.g. in the form of a circular disc, to produce a sputtering target.

Abstract: Production of silica "green" tapes employed in fabrication of multilayer circuit boards, by mixing silica powder comprised of spherical substantially uniform particles ranging in size from 0.1 to 2 microns, e.g., 0.7 micron, with a liquid medium containing a vinyl acetate--acrylic copolymer emulsion as binder, polyethylene glycol as plasticizer and dispersant, and preferably also including a small amount of boron, in the form of boric acid or boric oxide. The resulting slip is cast on a substrate, such as a polyester tape and dried to produce a crack-free tape. The resulting silica " green" tape is cut into individual tapes, a predetermined circuit pattern is screened onto each tape, preferably employing gold or copper conductors, and the polyester backing is removed from the tapes. The screened silica "green" tapes are then collated and registered to form a stack of layers, and the layers are laminated under pressure and at elevated temperature into a monolithic unit.