Abstract: A Coriolis vibratory gyroscope having a resonator with at least a first and a second n=2 vibratory modes of same resonance frequency in a resonator plane; first and second sensing circuits for generating first and second sense signals in response to a motion of the resonator along a major axis of the first and second vibratory modes; a first drive circuit for driving the resonator in the first vibratory mode with a first drive signal; a second drive circuit for simultaneously driving the resonator in the second vibratory mode with a second drive signal; wherein said first signal has a first frequency equal to a resonant frequency of said resonator in said first vibratory mode, and said second signal has the same frequency as the first signal, modulated in amplitude with a second frequency.

Abstract: A CVG having first and second degenerate resonator modes with each a damping rate; drive circuits for causing the resonator to oscillate in the first and second modes in response to first and second drive signals; first and second sense circuits for generating first and second sense signals in response to the resonator oscillating in the first and second modes; a signal processing circuit having control loops for generating the first and second drive signals based on the first and second sense signals; and first and second damping feedback circuits for generating first and second damping feedback signals proportional to the first and second damping rates; an adding the damping feedback signals to the first and second drive signals.

Abstract: A resonator includes an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.

Abstract: A resonator includes an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.

Abstract: An electromechanical resonator including a drive electrode set having at least one pair of alternating pole interdigitated drive electrodes and including a sense electrode set having at least one pair of alternating pole interdigitated sense electrodes.

Abstract: The present invention comprises systems, apparatuses, and methods for harvesting ambient mechanical energy at a lower frequency and transforming the harvested energy into electrical energy at a higher frequency. Transforming the energy from relatively lower input frequency energy to relatively higher output frequency energy can help realize greater efficiencies found at higher frequencies. Because the input plane of the ambient mechanical energy is not always predictable, some embodiments of the present invention comprise both in-plane and out-of-plane energy harvesters that produce an electrical output in multiple planes.

Abstract: Microelectromechanical resonators include a resonator body anchored to a substrate by at least one tether containing a coupled-ring linear acoustic bandgap structure therein. The coupled-ring linear acoustic bandgap structure can include a plurality of piezoelectric-on-semiconductor rings connected together by a plurality of piezoelectric-on-semiconductor tether segments. A first electrode may also be provided, which extends on the resonator body and the coupled-ring linear acoustic bandgap structure. This resonator body, which may be suspended opposite a recess in the substrate, may include a semiconductor (e.g., silicon) body having a piezoelectric layer (e.g., AlN) thereon, which extends between the semiconductor body and the first electrode. The coupled-ring linear acoustic bandgap structure may be a periodic structure, where a pitch between each of the plurality of piezoelectric-on-semiconductor rings in the at least one tether is equivalent, or a non-periodic structure.

Abstract: The present invention comprises systems, apparatuses, and methods for harvesting ambient mechanical energy at a lower frequency and transforming the harvested energy into electrical energy at a higher frequency. Transforming the energy from relatively lower input frequency energy to relatively higher output frequency energy can help realize greater efficiencies found at higher frequencies. Because the input plane of the ambient mechanical energy is not always predictable, some embodiments of the present invention comprise both in-plane and out-of-plane energy harvesters that produce an electrical output in multiple planes.