Abstract: In one embodiment, a processing chamber, suitable for use in semiconductor processing, includes a chamber body enclosing an interior volume. A susceptor is disposed in the interior volume, and the interior volume includes a purge interior volume below the susceptor and a process volume above the substrate support. A liner is disposed radially outward of the susceptor. The processing chamber also includes a preheat ring. The preheat ring is configured to engage the susceptor when the susceptor is an elevated processing position and to engage the liner when the susceptor is in a lowered loading/unloading position.

Abstract: A consumable film adapted to adhere to and dissolve in the oral cavity of a warm-blooded animal including humans, comprising at least one water soluble polymer, a taste masking effective amount of a sweetener, a mucosa-coating effective amount of a mucosa-coating agent and a pharmaceutically active agent having a sufficiently unpleasant taste that it is desirably masked by the sweetener.

Abstract: Physiologically acceptable films, including edible films, are disclosed. The films include a water soluble film-forming polymer such as pullulan. Edible films are disclosed that include pullulan and antimicrobially effective amounts of the essential oils thymol, methyl salicylate, eucalyptol and menthol. The edible films are effective at killing the plaque-producing germs that cause dental plaque, gingivitis and bad breath. The film can also contain pharmaceutically active agents. Methods for producing the films are also disclosed.

Abstract: Physiologically acceptable films, including edible films, are disclosed. The films include a water soluble film-forming polymer such as pullulan. Edible films are disclosed that include pullulan and antimicrobially effective amounts of the essential oils thymol, methyl salicylate, eucalyptol and menthol. The edible films are effective at killing the plaque-producing germs that cause dental plaque, gingivitis and bad breath. The film can also contain pharmaceutically active agents. Methods for producing the films are also disclosed.

Abstract: Oral compositions including zinc and a coolant provide extended breath freshening without the poor taste and astringency associated with zinc containing compositions.