Patents by Inventor Lovell C. Chase, III

Lovell C. Chase, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process chamber assembly with reflective hot plate and pivoting lid
    Patent number: 6416318
    Abstract: A hot plate assembly includes a base plate, a lid and a housing positioned between the base plate and the lid. The housing, lid and base plate form a process chamber. An insulator is positioned adjacent to the base plate in the process chamber. An air gap is formed at least partially between a bottom surface of the insulator and a top surface of the base plate. A hot plate is positioned adjacent to the insulator in the process chamber. At least a first reflective member is positioned between the hot plate and the insulator.
    Type: Grant
    Filed: June 13, 2000
    Date of Patent: July 9, 2002
    Assignee: Silicon Valley Group, Inc.
    Inventors: Jae Yun Lee, Lovell C. Chase, III