Patents by Inventor Loyal Gibbons

Loyal Gibbons has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hydrofluoric acid etcher and cascade rinser
    Patent number: 5089084
    Abstract: An apparatus used to HF gas etch a plurality of integrated circuit wafers within an etch chamber, followed by a de-ionized water cascade rinse in the chamber. On completion of the rinse and removal of the wafer carriers, the apparatus, housing, and supply conduits are purged with an inert gas to prepare the apparatus for a next batch of wafer carriers. The apparatus includes process-control means for automatically controlling each step of the process.
    Type: Grant
    Filed: December 3, 1990
    Date of Patent: February 18, 1992
    Assignee: Micron Technology, Inc.
    Inventors: Navjot Chhabra, Loyal Gibbons