Patents by Inventor Luc ROUMEN

Luc ROUMEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Estimating a parameter of a substrate
    Patent number: 11327406
    Abstract: A method for estimating a parameter across a region on a substrate, the region being divided into a plurality of sub-regions, the method including: obtaining values of the parameter for at least two sub-regions out of the plurality of sub-regions; and estimating the parameter for a position on the region by evaluation of a function having said values of the parameter as input values, wherein the function: a) has piecewise defined base functions, wherein a single base function is defined across a sub-region; and b) is continuous between one or more adjacent sub-regions of the at least two sub-regions within the region.
    Type: Grant
    Filed: April 2, 2019
    Date of Patent: May 10, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Svetla Petrova Matova, Jochem Sebastiaan Wildenberg, Roy Werkman, Luc Roumen
  • ESTIMATING A PARAMETER OF A SUBSTRATE
    Publication number: 20210271171
    Abstract: A method for estimating a parameter across a region on a substrate, the region being divided into a plurality of sub-regions, the method including: obtaining values of the parameter for at least two sub-regions out of the plurality of sub-regions; and estimating the parameter for a position on the region by evaluation of a function having said values of the parameter as input values, wherein the function: a) has piecewise defined base functions, wherein a single base function is defined across a sub-region; and b) is continuous between one or more adjacent sub-regions of the at least two sub-regions within the region.
    Type: Application
    Filed: April 2, 2019
    Publication date: September 2, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Svetla Petrova MATOVA, Jochem Sebastiaan WILDENBERG, Roy WERKMAN, Luc ROUMEN