Abstract: Ink jet printhead comprising one or more ejection module, each with a silicon chip, a plurality of ejector nozzles arranged adjacent to a front of the module, ejection cells for the nozzles and delivery channels for the ink of the cells. The module or modules each include a distribution channel adjacent to the front and in fluid communication with the delivery channels and a nozzle layer integrated with the relative chip and in which the ejector nozzles parallel to the front are made. The head also comprises a support on which the module or modules are mounted and which defines a feeding duct for the ink in fluid communication with the delivery channels and sealing means between the module or modules and the support to guarantee fluid tightness between the feeding duct and the ejection cells.

Abstract: A process for manufacturing an inkjet print head comprising the steps of providing a print head wafer comprising a plurality of print head dice coated with a barrier layer, each print head die comprising a plurality of actuators and interconnections, the barrier layer comprising a plurality of openings in correspondence with the plurality of actuators and interconnections, providing a debondable SOI wafer comprising a handle layer, a buried layer, and a device layer, forming a protective layer on the surface of the device layer, bonding the device layer to the barrier layer, debonding the handle layer from the SOI wafer, etching the device layer so as to realize a plurality of openings in correspondence with the plurality of actuators and interconnections, and removing the protective layer in correspondence of the plurality of openings.

Abstract: The chambers (42) and each corresponding ink feeding duct (56), made in a structural layer of photosensitive resin (38), are delimited by a flat bottom wall (36) made of a protective layer (34, 36) of tantalum and gold and an upper wall (44), consisting of a substantially concave surface, including at least one ejection nozzle (46) and joined to the bottom wall along a continuous perimetral line (52), in which the inner shape of each of the chambers (42) and of each of the feeding ducts (56) represents the complementary impression of the outer form of a sacrificial layer (57), obtained from a controlled and non-contained growth of a metal, deposited starting from the dimensions of the layer of gold (36), laid on top of the layer of tantalum (34).

Abstract: An ink jet printhead, made of a silicon substrate and a plurality of metallic and dielectric layers deposited on said substrate. A plurality of chambers for ejection of ink droplets and a plurality of corresponding feeding ducts, connected to the chambers, are produced in a structural layer made of non-photosensitive epoxy or polyamide resin. The chambers and said ducts are delimited by at least one upper wall, the upper wall communicating with at least one nozzle for ejection of the ink droplets. The upper wall and an inner wall of the nozzle are coated with at least one metallic coating layer, suitable for increasing the resistance of the walls to chemically aggressive liquids, in contact with the walls.

Abstract: Process for protectively coating against aggressive liquids hydraulic microcircuits made in a resin, particularly for an ink jet printhead, consisting of: disposing of a silicon substrate comprising a sacrificial layer of copper, deposited on the substrate and defining the inner shape of the hydraulic microcircuits; depositing on top of the outer surface of the sacrificial layer, by means of an electrochemical process, at least one protective, metallic coating layer; applying on the sacrificial layer a non-photosensitive epoxy or polyamide resin, having a predetermined thickness and suitable for completely covering the sacrificial layer; effecting a polymerization of the resin to increase its mechanical resistance to mechanical and thermal stresses and performing a planarization of the outer surface of the resin, by means of a mechanical lapping and simultaneous chemical treatment; removing the sacrificial layer through a chemical etching in a highly acid bath; and depositing a metallic, protective layer on t

Abstract: Ink jet printhead comprising one or more ejection module, each with a silicon chip, a plurality of ejector nozzles arranged adjacent to a front of the module, ejection cells for the nozzles and delivery channels for the ink of the cells. The module or modules each include a distribution channel adjacent to the front and in fluid communication with the delivery channels and a nozzle layer integrated with the relative chip and in which the ejector nozzles parallel to the front are made. The head also comprises a support on which the module or modules are mounted and which defines a feeding duct for the ink in fluid communication with the delivery channels and sealing means between the module or modules and the support to guarantee fluid tightness between the feeding duct and the ejection cells.

Abstract: Process for protectively coating against aggressive liquids hydraulic microcircuits made in a resin (32), particularly for an ink jet printhead, consisting of: a9 disposing of a silicon substrate (20) comprising a sacrificial layer (26) of copper, deposited on the substrate and defining the inner shape of the hydraulic microcircuits (35, 36, 37); b) depositing on top of the outer surface of the sacrificial layer (26), by means of an electrochemical process, at least one protective, metallic coating layer (30); c) applying on the sacrificial layer (26) a non-photosensitive epoxy or polyamide resin (32), having a predetermined thickness and suitable for completely covering the sacrificial layer (26); d) effecting a polymerization of the resin (32) to increase its mechanical resistance to mechanical and thermal stresses and performing a planarization of the outer surface (33) of the resin (32), by means of a mechanical lapping and simultaneous chemical treatment; e) removing the sacrificial layer (26) through a

Abstract: The chambers (42) and each corresponding ink feeding duct (56), made in a structural layer of photosensitive resin (38), are delimited by a flat bottom wall (36) made of a protective layer (34, 36) of tantalum and gold and an upper wall (44), consisting of a substantially concave surface, including at least one ejection nozzle (46) and joined to the bottom wall along a continuous perimetral line (52), in which the inner shape of each of the chambers (42) and of each of the feeding ducts (56) represents the complementary impression of the outer form of a sacrificial layer (57), obtained from a controlled and non-contained growth of a metal, deposited starting from the dimensions of the layer of gold (36), laid on top of the layer of tantalum (34).