Patents by Inventor Luigi Mele
Luigi Mele has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240047170Abstract: Compact correctors for correcting spherical aberrations of a particle-optical lens in a charged particle microscope system, according to the present disclosure a strong hexapole configured to generate a strong hexapole field when a voltage is applied to it, and a weak hexapole positioned between the strong hexapole and a sample. The strong hexapole is positioned such that the crossover of a charged particle beam of the charged particle system does not pass through the center of the strong hexapole, such that the strong hexapole field applies at least an A2 aberration and a D4 aberration to the charged particle beam. The weak hexapole is further positioned or otherwise configured such that, when a voltage is applied to the weak hexapole it generates a weak hexapole field that applies at least a combination A2 aberration and a combination D4 aberration to the charged particle beam of the charged particle microscopy system.Type: ApplicationFiled: August 8, 2022Publication date: February 8, 2024Applicant: FEI CompanyInventors: Ali MOHAMMADI-GHEIDARI, Alexander HENSTRA, Luigi MELE
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Publication number: 20240047171Abstract: The present invention is directed to an electrode component with at least two electrodes or a multipole component as generally known in the art. Each of the electrodes can be provided with a beam neighboring section or end section forming the free electrodes. This section is the section exposed to high voltages, i.e. more than 10 KV, and is intended to nevertheless work very reliable and precise with respect to the guidance and/or controlling of a beam of a charged particle beam in a microscope or lithographic apparatus. This neighboring section are positioned in the vicinity or close to a charged particle beam or even facing it. This bears the preferred advantage that high voltages can be generated by the electrodes or to the electrode component and they can withstand those high voltages. This assists in a better guidance and/or controlling of the charged beam, such as for compensating aberration etc. The beam neighboring section can have a surface configured to face the beam.Type: ApplicationFiled: August 8, 2022Publication date: February 8, 2024Applicant: FEI CompanyInventors: Ali MOHAMMADI-GHEIDARI, Alexander HENSTRA, Luigi MELE
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Publication number: 20210072170Abstract: Various methods and devices are provided for searching the optimum sample condition of a sample for cryogenic electron microscopy. Multiple samples with different sample conditions may be screened using a sample inspection device. The sample inspection device includes at least a chamber formed between a top electron transparent layer and a bottom electron transparent layer for holding the sample. Multiple pillars are arranged within the chamber. The sample inspection device includes a window covering at least one of the multiple pillars.Type: ApplicationFiled: September 9, 2019Publication date: March 11, 2021Applicant: FEI CompanyInventors: Bas HENDRIKSEN, Maarten KUIJPER, Luigi MELE, Pleun DONA, Erum RAJA, Atieh AMINIAN
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Patent number: 10921268Abstract: Various methods and devices are provided for searching the optimum sample condition of a sample for cryogenic electron microscopy. Multiple samples with different sample conditions may be screened using a sample inspection device. The sample inspection device includes at least a chamber formed between a top electron transparent layer and a bottom electron transparent layer for holding the sample. Multiple pillars are arranged within the chamber. The sample inspection device includes a window covering at least one of the multiple pillars.Type: GrantFiled: September 9, 2019Date of Patent: February 16, 2021Assignee: FEI CompanyInventors: Bas Hendriksen, Maarten Kuijper, Luigi Mele, Pleun Dona, Erum Raja, Atieh Aminian
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Patent number: 10453647Abstract: A method of operating a charged particle microscope comprising the following steps: Providing a specimen on a specimen holder; Using a source to produce a beam of charged particles that is subject to beam current fluctuations; Employing a beam current sensor, located between said source and specimen holder, to intercept a part of the beam and produce an intercept signal proportional to a current of the intercepted part of the beam, the beam current sensor comprising a hole arranged to pass a beam probe with an associated probe current; Scanning said probe over the specimen, thereby irradiating the specimen with a specimen current, with a dwell time associated with each scanned location on the specimen; Using a detector to detect radiation emanating from the specimen in response to irradiation by said probe, and producing an associated detector signal; Using said intercept signal as input to a compensator to suppress an effect of said current fluctuations in said detector signal, wherein: The beam currentType: GrantFiled: February 16, 2017Date of Patent: October 22, 2019Assignee: FEI COMPANYInventors: Ali Mohammadi-Gheidari, Luigi Mele, Peter Christiaan Tiemeijer, Gerard Nicolaas Anne van Veen, Hendrik Nicolaas Slingerland
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Patent number: 10325750Abstract: A collision ionization source is disclosed herein. An example source includes an ionization region arranged to receive a gas and a charged particle beam, the charged particle beam to ionize at least some of the gas, and a supply duct arranged to provide the gas to the ionization region, the supply duct having a non-uniform height decreasing from an input orifice to an output orifice, the output orifice arranged adjacent to the ionization region.Type: GrantFiled: January 18, 2018Date of Patent: June 18, 2019Assignee: FEI COMPANYInventors: Gregory A. Schwind, Aurelien Philippe Jean Maclou Botman, Sean Kellogg, Leon van Kouwen, Luigi Mele
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Publication number: 20180233322Abstract: A method of operating a charged particle microscope comprising the following steps: Providing a specimen on a specimen holder; Using a source to produce a beam of charged particles that is subject to beam current fluctuations; Employing a beam current sensor, located between said source and specimen holder, to intercept a part of the beam and produce an intercept signal proportional to a current of the intercepted part of the beam, the beam current sensor comprising a hole arranged to pass a beam probe with an associated probe current; Scanning said probe over the specimen, thereby irradiating the specimen with a specimen current, with a dwell time associated with each scanned location on the specimen; Using a detector to detect radiation emanating from the specimen in response to irradiation by said probe, and producing an associated detector signal; Using said intercept signal as input to a compensator to suppress an effect of said current fluctuations in said detector signal, wherein: The beam currentType: ApplicationFiled: February 16, 2017Publication date: August 16, 2018Applicant: FEI CompanyInventors: Ali Mohammadi Gheidari, Luigi Mele, Peter Christiaan Tiemeijer, Gerard Nicolaas Anne van Veen, Hendrik Nicolaas Slingerland
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Publication number: 20180211807Abstract: A collision ionization source is disclosed herein. An example source includes an ionization region arranged to receive a gas and a charged particle beam, the charged particle beam to ionize at least some of the gas, and a supply duct arranged to provide the gas to the ionization region, the supply duct having a non-uniform height decreasing from an input orifice to an output orifice, the output orifice arranged adjacent to the ionization region.Type: ApplicationFiled: January 18, 2018Publication date: July 26, 2018Applicant: FEI CompanyInventors: Gregory A. Schwind, Aurelien Philippe Jean Maclou Botman, Sean Kellogg, Leon van Kouwen, Luigi Mele
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Patent number: 9899181Abstract: A collision ionization ion source comprising: A pair of stacked plates, sandwiched about an intervening gap; An input zone (aperture), provided in a first of said plates, to admit an input beam of charged particles to said gap; An output zone (aperture), located opposite said input zone and provided in the second of said plates, to allow emission of a flux of ions from said gap; A gas space, between said input and output zones, in which gas can be ionized by said input beam so as to produce said ions; A supply duct in said gap, for supplying a flow of said gas to said gas space, and comprising: An emergence orifice, opening into said gas space; An entrance orifice, connectable to a gas supply, wherein said duct comprises at least one transition region between said entrance orifice and said emergence orifice in which an inner height of said duct, measured normal to the plates, decreases from a first height value to a second height value.Type: GrantFiled: January 12, 2017Date of Patent: February 20, 2018Assignee: FEI CompanyInventors: Gregory A. Schwind, Aurelien Philippe Jean Maclou Botman, Sean Kellogg, Leon van Kouwen, Luigi Mele
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Patent number: 9812285Abstract: Presented is a holder assembly for cooperating with a nanoreactor and an electron microscope. The holder assembly has a distal end for holding the nanoreactor. The volume has a fluid inlet and outlet. The holder assembly has fluid supply and outlet tubes which in working are connected to the fluid inlet and outlet of the nanoreactor. In working, the connection between the fluid inlet and outlet and the respective supply and outlet tubes are sealed by sealing elements. The holder assembly has a recess which, when the nanoreactor is attached and the holder is inserted into the evacuated portion of an electron microscope, forms a sealed pre-vacuum volume between the holder and the nanoreactor, with the pre-vacuum volume being evacuated via a pre-vacuum channel such that any fluid leakage is pumped away and does not enter the evacuated part of the electron microscope.Type: GrantFiled: July 25, 2016Date of Patent: November 7, 2017Assignee: FEI CompanyInventors: Pleun Dona, Luigi Mele
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Patent number: 9778377Abstract: A Transmission Charged-Particle Microscope comprises a source of charged particles which are then directed by an illuminator onto a specimen supported by a specimen holder. Charged particles transmitted through the specimen may undergo energy loss with a distribution of losses providing information about the specimen. A dispersing device disperses the transmitted charged particles into an energy-resolved array of spectral sub-beams distributed along a dispersion direction. The dispersed charged particles are detected by a detector comprising an assembly of sub-detectors arranged along said dispersion direction, whereby different sub-detectors are adjustable to have different detection sensitivities.Type: GrantFiled: March 17, 2016Date of Patent: October 3, 2017Assignee: FEI CompanyInventors: Luigi Mele, Albertus Aemillius Seyno Sluijterman, Gerard Nicolaas Anne van Veen
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Patent number: 9741529Abstract: A micro-chamber for inspecting sample material can be filled with sample material immersed in a liquid without the need of applying vacuum tubing's to the micro-chamber. The micro-chamber includes an inspection volume for holding the sample material for observation. The inspection volume is defined by a first rigid layer, a second rigid layer spaced from the first rigid layer, and a hermetic seal between the first and the second rigid layers. One of the rigid layers includes thin part can be punctured. The liquid with immersed sample material, when placed upon the thin part, is sucked into the evacuated inspection volume when the thin part is punctured.Type: GrantFiled: July 27, 2016Date of Patent: August 22, 2017Assignee: FEI CompanyInventors: Luigi Mele, Pleun Dona, Gerard Nicolaas Anne van Veen
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Publication number: 20170213691Abstract: Presented is a holder assembly for cooperating with a nanoreactor and an electron microscope. The holder assembly has a distal end for holding the nanoreactor. The volume has a fluid inlet and outlet. The holder assembly has fluid supply and outlet tubes which in working are connected to the fluid inlet and outlet of the nanoreactor. In working, the connection between the fluid inlet and outlet and the respective supply and outlet tubes are sealed by sealing elements. The holder assembly has a recess which, when the nanoreactor is attached and the holder is inserted into the evacuated portion of an electron microscope, forms a sealed pre-vacuum volume between the holder and the nanoreactor, with the pre-vacuum volume being evacuated via a pre-vacuum channel such that any fluid leakage is pumped away and does not enter the evacuated part of the electron microscope.Type: ApplicationFiled: July 25, 2016Publication date: July 27, 2017Applicant: FEI CompanyInventors: Pleun Dona, Luigi Mele
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Publication number: 20170032928Abstract: A micro-chamber for inspecting a sample material immersed in a liquid and a method for filling such a chamber are described. The sample chamber includes an inspection volume for holding the sample material, the inspection volume defined by first and second rigid layers, with a hermetic seal between the layers. The inspection volume within the sample chamber is evacuated. Prior to filling the inspection volume, a thin part of at least one of the rigid layers separates the inspection volume from the outside, the thin part being equipped to be punctured. The liquid with immersed sample material is placed upon the thin part and the thin part is then punctured, resulting in sample material entering the inspection volume.Type: ApplicationFiled: July 27, 2016Publication date: February 2, 2017Applicant: FEI CompanyInventors: Luigi Mele, Pleun Dona, Gerard Nicolaas Anne van Veen
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Publication number: 20160276130Abstract: A Transmission Charged-Particle Microscope, comprising: A specimen holder, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; An imaging system, for receiving a flux of charged particles transmitted through the specimen and directing it onto a spectroscopic apparatus comprising: A dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams distributed along a dispersion direction; A detector, said detector comprising an assembly of sub-detectors arranged along said dispersion direction, whereby different sub-detectors are adjustable to have different detection sensitivities.Type: ApplicationFiled: March 17, 2016Publication date: September 22, 2016Applicant: FEI CompanyInventors: Luigi Mele, Albertus Aemillius Seyno Sluijterman, Gerard Nicolaas Anne van Veen