Abstract: A measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts contains a cantilever with an electrically conductive probe tip, a piezoresistive sensor that is integrated into the cantilever and a heating-wire actuator that is located in the vicinity of the probe tip. The heating-wire actuator induces mechanical oscillations in the probe tip during scanning operations and can be used during the analyses to produce a preselected tracking force, with which the probe tip lies on the component. The sensor is used during the scanning operation according to AFM methods to maintain a constant distance between the probe tip and the surface of the component and during the analyses to measure the tracking force of the probe tip on the component, and/or to adjust said force with the aid of the heating-wire actuator. A device equipped with a measuring system of this type for the combined scanning and analysis of microtechnical components is also disclosed.