Patents by Inventor Lulu XIONG

Lulu XIONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective Deposition of Thin Films with Improved Stability
    Publication number: 20240110284
    Abstract: A method of processing a substrate is disclosed which includes depositing a layer in a processing chamber on a field region, a sidewall region, and a fill region of a feature of the substrate, wherein a hardness of a portion of the layer deposited on the sidewall region is lower than a hardness of a portion of the layer deposited on the field region, and lower than a hardness of a portion of the layer deposited on the fill region.
    Type: Application
    Filed: September 26, 2023
    Publication date: April 4, 2024
    Inventors: Lulu XIONG, Kevin Hsiao, Chris LIU, Chieh-Wen LO, Sean M. SEUTTER, Deenesh PADHI, Prayudi LIANTO, Peng SUO, Guan Huei SEE, Zongbin WANG, Shengwei ZENG, Balamurugan RAMASAMY