Patents by Inventor Luuk Johannes Helena SEELEN

Luuk Johannes Helena SEELEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MIRROR CALIBRATING METHOD, A POSITION MEASURING METHOD, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
    Publication number: 20220357147
    Abstract: A method for calibrating a mirror of an interferometer system configured to measure a position of an object using two interferometers of the interferometer system that are arranged at opposite sides of the object and configured to measure the position of the object in the same X-direction, wherein two sets of measurements are obtained for different rotational orientations about an axis perpendicular to the X-direction to determine a shape of the mirror. There is also provided a position measuring method in which the obtained shape of the mirror is used to adjust measurements in the X-direction, a lithographic apparatus and a device manufacturing method making use of such a lithographic apparatus.
    Type: Application
    Filed: June 5, 2020
    Publication date: November 10, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johannes Mathias Theodorus Antonius ADRIAENS, Carolus Johannes Catharina SCHOORMANS, Luuk Johannes Helena SEELEN