Abstract: This invention relates to a vapor or liquid phase reagent dispensing apparatus that may be used for dispensing vapor or liquid phase reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices. The vapor phase reagent dispensing apparatus has a single port capable of receiving a carrier gas and dispensing a vapor phase reagent. The liquid phase reagent dispensing apparatus has a single port capable of receiving an inert gas and dispensing a liquid phase reagent.

Abstract: This invention relates to a vapor or liquid phase reagent dispensing apparatus that may be used for dispensing vapor or liquid phase reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices. The vapor phase reagent dispensing apparatus has a single port capable of receiving a carrier gas and dispensing a vapor phase reagent. The liquid phase reagent dispensing apparatus has a single port capable of receiving an inert gas and dispensing a liquid phase reagent.

Abstract: A method of heating process streams fed to a boiler incorporating an oxygen transport membrane device that includes an oxygen-containing stream and a boiler feed water stream. The membrane device separates oxygen to support combustion of a fuel and generate heat to raise the steam. Heat is recovered and process streams are heated by separately heating portions of the oxygen-containing stream and the boiler feed water stream with a retentate stream produced from the oxygen separation and a flue gas stream generated from the combustion. The flow rate of the portion of the oxygen-containing stream heated by the retentate stream is greater than that heated by the flue gas stream to help minimize heat transfer area and thus, fabrication costs. Also, water is condensed from the flue gas stream during the heat exchange involved in the heat recovery to increase thermodynamic efficiency.

Abstract: A method for the cryogenic separation of air having defined temperatures for condensed feed air passed into a double column system relative to liquid oxygen and preferably to shelf vapor, and wherein kettle liquid is not subcooled from the higher pressure column to the lower pressure column.

Abstract: Monitoring pressurized fluid containers through use of a container site subsystem and a system hub. The container site subsystem including sensor(s) to sense a characteristic associated with a pressurized fluid container; and a container site hub to receive, from each sensor, raw data corresponding to the sensed characteristic. The system hub receives the aggregated raw data from the container site hub, and converts the raw data to process values.

Abstract: Monitoring pressurized fluid containers through use of a container site subsystem and a system hub. The container site subsystem including sensor(s) to sense a characteristic associated with a pressurized fluid container; and a container site hub to receive, from each sensor, raw data corresponding to the sensed characteristic. The system hub receives the aggregated raw data from the container site hub, and converts the raw data to process values.

Abstract: Monitoring pressurized fluid containers through use of a container site subsystem and a system hub. The container site subsystem including sensor(s) to sense a characteristic associated with a pressurized fluid container; and a container site hub to receive, from each sensor, raw data corresponding to the sensed characteristic. The system hub receives the aggregated raw data from the container site hub, and converts the raw data to process values.

Abstract: A method of heating a fluid utilizing a process heater having one or more first combustion zones and one or more second combustion zones. The combustion of a fuel is divided between the first and second combustion zones. The oxygen is provided for combustion within the first combustion zone by one or more oxygen transport membranes that contribute between about 50 and 99 percent of the stoichiometric amount of oxygen required for complete combustion of the fuel passing through the process heater. A supplemental or secondary oxidant is introduced into second combustion zone to complete combustion of the fuel and thereby produce a flue gas stream containing between about 1 and 3 percent oxygen to ensure complete combustion of the fuel. In this manner, the surface area of the oxygen transport membranes may be reduced below the surface area that otherwise would be required if 100 percent of the oxygen were contributed by the oxygen transport membranes.

Abstract: A method of heating process streams fed to a boiler incorporating an oxygen transport membrane device that includes an oxygen-containing stream and a boiler feed water stream. The membrane device separates oxygen to support combustion of a fuel and generate heat to raise the steam. Heat is recovered and process streams are heated by separately heating portions of the oxygen-containing stream and the boiler feed water stream with a retentate stream produced from the oxygen separation and a flue gas stream generated from the combustion. The flow rate of the portion of the oxygen-containing stream heated by the retentate stream is greater than that heated by the flue gas stream to help minimize heat transfer area and thus, fabrication costs. Also, water is condensed from the flue gas stream during the heat exchange involved in the heat recovery to increase thermodynamic efficiency.

Abstract: A system for cooling one or more discrete superconducting devices wherein a primary refrigerator subcools cryogenic liquid for desubcooling in the devices and subsequently resubcools this liquid in a recirculation loop, and additional cryogenic liquid is maintained in a subcooled condition within a reserve storage container by diversion of some of the refrigeration generated by the primary refrigerator into the reserve storage container.

Abstract: A method of heating a fluid in a fluid heater integrated with a gas turbine. Fuel is burned in a radiant section of the fluid heater to heat the fluid and to produce combustion gases for the heating a downstream convective section. The combustion is supported by a combined oxidant stream. An oxygen containing stream or the combined stream, which is made up in part by the oxygen containing stream is preheated through indirect heat transfer with a first gas turbine exhaust stream produced by the gas turbine. A second gas turbine exhaust stream, also produced by the gas turbine is combined with the oxygen containing stream to form the combined oxidant stream. As such, the available heat energy supplied to the fluid heater is supplied not only by the combustion but also the gas turbine. This allows for the fuel to be conserved or for increased fluid throughput.

Abstract: A method of heating a fluid in a fluid heater integrated with a gas turbine. Fuel is burned in a radiant section of the fluid heater to heat the fluid and to produce combustion gases for the heating a downstream convective section. The combustion is supported by a combined oxidant stream. An oxygen containing stream or the combined stream, which is made up in part by the oxygen containing stream is preheated through indirect heat transfer with a first gas turbine exhaust stream produced by the gas turbine. A second gas turbine exhaust stream, also produced by the gas turbine is combined with the oxygen containing stream to form the combined oxidant stream. As such, the available heat energy supplied to the fluid heater is supplied not only by the combustion but also the gas turbine. This allows for the fuel to be conserved or for increased fluid throughput.

Abstract: A method of heating a fluid in a fluid heater integrated with a gas turbine. Fuel is burned in a radiant section of the fluid heater to heat the fluid and to produce combustion gases for the heating a downstream convective section. The combustion is supported by a combined oxidant stream. An oxygen containing stream or the combined stream, which is made up in part by the oxygen containing stream is preheated through indirect heat transfer with a first gas turbine exhaust stream produced by the gas turbine. A second gas turbine exhaust stream, also produced by the gas turbine is combined with the oxygen containing stream to form the combined oxidant stream. As such, the available heat energy supplied to the fluid heater is supplied not only by the combustion but also the gas turbine. This allows for the fuel to be conserved or for increased fluid throughput.

Abstract: A method for operating a cryocooler which provides opportunity for timely intervention prior to failure thus enhancing the reliability of the provision of the refrigeration wherein contaminant concentration downstream of a compressor but upstream of the cryocooler is monitored and the time rate of change of the contaminant concentration is used to calculate a service time.

Abstract: An integrated process and apparatus for integrating an alkene derivative process, such as ethylene oxide process, with an ethylene process so that any ethylene entrapped in the purge stream of the alkene derivative process can be effectively recovered through the ethylene process portion of the integrated process.

Abstract: A system for providing refrigeration to a chemical processing operation wherein a refrigerant fluid is compressed and cooled, and a portion turboexpanded prior to being passed to a chemical processing operation for direct contact or indirect heat exchange.

Abstract: A system for providing refrigeration to a chemical processing operation wherein a refrigerant fluid is compressed and cooled, and a portion turboexpanded prior to being passed to a chemical processing operation for direct contact or indirect heat exchange.

Abstract: An integrated process and apparatus for integrating an alkene derivative process, such as ethylene oxide process, with an ethylene process so that any ethylene entrapped in the purge stream of the alkene derivative process can be effectively recovered through the ethylene process portion of the integrated process.

Abstract: A method and apparatus for providing direct contact refrigeration to a heat source wherein refrigeration is generated using a recirculating defined multicomponent refrigerant fluid, and transferred to a direct contact refrigerant fluid which directly contacts the heat source.

Abstract: A method and apparatus for increasing power output and efficiency of gas turbines. Power output is enhanced and NOx emissions are lowered while heat rate penalties are minimized by adding nitrogen or a mixture of nitrogen and water vapor to the gas turbine in conjunction with the use of low pressure steam.