Patents by Inventor Maarten J. Teepen

Maarten J. Teepen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reactor precoating for reduced stress and uniform CVD
    Patent number: 6974781
    Abstract: A method is provided for obtaining stable and elevated deposition rates in a reaction chamber, following the cleaning of the chamber. The method involves cleaning of the chamber, pre-coating the interior surfaces of the reaction chamber with an inorganic composition, and then, using the pre-coated chamber to deposit an organic layer onto a workpiece.
    Type: Grant
    Filed: October 20, 2003
    Date of Patent: December 13, 2005
    Assignee: ASM International N.V.
    Inventors: Eric A. H. Timmermans, Maarten J. Teepen, Raffaele Mucciato, Rudi Wilhelm